Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition
文献类型：期刊论文
| 作者 | Li SH(李帅辉) ; Shu YH(舒勇华); Fan J(樊菁)
|
| 刊名 | Science In China Series E-Technological Sciences
 |
| 出版日期 | 2008 |
| 页码 | 1470-1482 |
| 通讯作者邮箱 | jfan@imech.ac.cn |
| 关键词 | Electron Beam Physical Vapor Deposition Thin Film Thickness And Species Distributions Vapor Atom Nonequilibrium Transport Monte-Carlo-Simulation Sphere Model Evaporation |
| ISSN号 | 1006-9321 |
| 通讯作者 | Fan, J (reprint author), Chinese Acad Sci, Inst Mech, Lab High Temp Gas Dynam, Beijing 100190, Peoples R China. |
| 中文摘要 | Thickness and component distributions of large-area thin films are an issue of international concern in the field of material processing. The present work employs experiments and direct simulation Monte Carlo (DSMC) method to investigate three-dimensional low-density, non-equilibrium jets of yttrium and titanium vapor atoms in an electron-beams physical vapor deposition (EBPVD) system furnished with two or three electron-beams, and obtains their deposition thickness and component distributions onto 4-inch and 6-inch mono-crystal silicon wafers. The DSMC results are found in excellent agreement with our measurements, such as evaporation rates of yttrium and titanium measured in-situ by quartz crystal resonators, deposited film thickness distribution measured by Rutherford backscattering spectrometer (RBS) and surface profilometer and deposited film molar ratio distribution measured by RBS and inductively coupled plasma atomic emission spectrometer (ICP-AES). This can be taken as an indication that a combination of DSMC method with elaborate measurements may be satisfactory for predicting and designing accurately the transport process of EBPVD at the atomic level. |
| 类目[WOS] | Engineering, Multidisciplinary ; Materials Science, Multidisciplinary |
| 研究领域[WOS] | Engineering ; Materials Science |
| 关键词[WOS] | MONTE-CARLO-SIMULATION ; SPHERE MODEL ; EVAPORATION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000258286000016 |
| 公开日期 | 2009-08-03 ; 2009-09-14 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/25928]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Li SH,Shu YH,Fan J. Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition[J]. Science In China Series E-Technological Sciences,2008:1470-1482. |
| APA | 李帅辉,舒勇华,&樊菁.(2008).Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition.Science In China Series E-Technological Sciences,1470-1482. |
| MLA | 李帅辉,et al."Thickness And Component Distributions Of Yttrium-Titanium Alloy Films In Electron-Beam Physical Vapor Deposition".Science In China Series E-Technological Sciences (2008):1470-1482. |
入库方式： OAI收割
来源：力学研究所
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