Pull-In Instability Of Micro-Switch Actuators: Model Review
文献类型：期刊论文
| 作者 | Lin WH(林文惠) ; Zhao YP(赵亚溥)
|
| 刊名 | International Journal of Nonlinear Sciences and Numerical Simulation
 |
| 出版日期 | 2008 |
| 页码 | 175-183 |
| 通讯作者邮箱 | yzhao@imech.ac.cn |
| 关键词 | Pull-In Micro And Nano-Switches Error Estimation Theoretical Models Nanoscale Electrostatic Actuators Van-Der-Waals Variational Iteration Method Rf Mems Switches Torsional Actuators Microelectromechanical Systems Behavior Parameters Stability Forces |
| ISSN号 | 1565-1339 |
| 通讯作者 | Zhao, YP (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | The existing three widely used pull-in theoretical models (i.e., one-dimensional lumped model, linear supposition model and planar model) are compared with the nonlinear beam mode in this paper by considering both cantilever and fixed-fixed type micro and nano-switches. It is found that the error of the pull-in parameters between one-dimensional lumped model and the nonlinear beam model is large because the denominator of the electrostatic force is minimal when the electrostatic force is computed at the maximum deflection along the beam. Since both the linear superposition model and the slender planar model consider the variation of electrostatic force with the beam's deflection, these two models not only are of the same type but also own little error of the pull-in parameters with the nonlinear beam model, the error brought by these two models attributes to that the boundary conditions are not completely satisfied when computing the numerical integration of the deflection. |
| 类目[WOS] | Engineering, Multidisciplinary ; Mathematics, Applied ; Mechanics ; Physics, Mathematical |
| 研究领域[WOS] | Engineering ; Mathematics ; Mechanics ; Physics |
| 关键词[WOS] | NANOSCALE ELECTROSTATIC ACTUATORS ; VAN-DER-WAALS ; VARIATIONAL ITERATION METHOD ; RF MEMS SWITCHES ; TORSIONAL ACTUATORS ; MICROELECTROMECHANICAL SYSTEMS ; BEHAVIOR ; PARAMETERS ; STABILITY ; FORCES |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000257002700007 |
| 公开日期 | 2009-08-03 ; 2009-09-14 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/25980]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Lin WH,Zhao YP. Pull-In Instability Of Micro-Switch Actuators: Model Review[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2008:175-183. |
| APA | 林文惠,&赵亚溥.(2008).Pull-In Instability Of Micro-Switch Actuators: Model Review.International Journal of Nonlinear Sciences and Numerical Simulation,175-183. |
| MLA | 林文惠,et al."Pull-In Instability Of Micro-Switch Actuators: Model Review".International Journal of Nonlinear Sciences and Numerical Simulation (2008):175-183. |
入库方式： OAI收割
来源：力学研究所
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