中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor

文献类型:期刊论文

作者Zhang, Wen1,2; Miao, Wei1,2; Wang, Zheng1,2; Liu, Dong1,2; Zhong, Jia-Qiang1,2; Guo, Xiao-Hui1,2; Wu, F.1,2; Yao, QiJun1,2; Shi, Sheng-Cai1,2
刊名IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
出版日期2017-06-01
卷号27期号:4页码:6
关键词Superconducting transition edge sensor thermal conductance response time noise equivalent power KOH wet etch
ISSN号1051-8223
DOI10.1109/TASC.2017.2655729
通讯作者Zhang, Wen(wzhang@pmo.ac.cn)
英文摘要Superconducting transition edge sensors (TES) based on a Ti microbridge on Si substrate have demonstrated a very low noise equivalent power. Their effective response time, however, is in the order of microseconds due to relatively high transition temperature (i.e., 300-400 mK) of the Ti microbridge, making it difficult to read out the signal of a large Ti TES array with a SQUID-based multiplexer. We propose a twin-slot antenna coupled superconducting Ti microbridge separated from the antenna feed and supported by a free-standing membrane. Its resistive transition (R-T) and current-voltage (I-V) curves are measured before and after KOH wet etching of the Si substrate underneath the Ti microbridge. The free-standing membrane supported Ti TES with a thickness of 40 nm shows slightly lower transition temperature and higher normal resistance. Its thermal conductance is reduced to similar to 800 pW/ K from similar to 3000 pW/ K. In addition, its effective response time measured with a current pulse signal is about 5 mu s. The uniformity of the 8 x 8 TES array is studied by measuring the distribution of normal resistance and critical temperature. In order to improve the uniformity, we increase the Ti film thickness to 64 nm, and characterize its thermal and electrical features.
WOS关键词ANTENNA ; BOLOMETER ; MICROCALORIMETER ; RESOLUTION ; TELESCOPE ; THZ
WOS研究方向Engineering ; Physics
语种英语
WOS记录号WOS:000395800200001
出版者IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
源URL[http://libir.pmo.ac.cn/handle/332002/23291]  
专题中国科学院紫金山天文台
通讯作者Zhang, Wen
作者单位1.Chinese Acad Sci, Purple Mt Observ, Nanjing 210008, Jiangsu, Peoples R China
2.Key Lab Radio Astron, Nanjing 210008, Jiangsu, Peoples R China
推荐引用方式
GB/T 7714
Zhang, Wen,Miao, Wei,Wang, Zheng,et al. Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2017,27(4):6.
APA Zhang, Wen.,Miao, Wei.,Wang, Zheng.,Liu, Dong.,Zhong, Jia-Qiang.,...&Shi, Sheng-Cai.(2017).Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,27(4),6.
MLA Zhang, Wen,et al."Characterization of a Free-Standing Membrane Supported Superconducting Ti Transition Edge Sensor".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 27.4(2017):6.

入库方式: OAI收割

来源:紫金山天文台

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