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Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes

文献类型：期刊论文

作者Yang, Jun1,2; Luo, Shi1; Zhou, Xi1; Li, Jialu1; Fu, Jianting1; Yang, Weidong3; Wei, Dapeng1
刊名ACS APPLIED MATERIALS & INTERFACES
出版日期2019-04-24
卷号11期号:16页码:14997-15006
关键词capacitive pressure sensor microconformal graphene electrodes ultrasensitive flexible tunable
ISSN号1944-8244
DOI10.1021/acsami.9b02049
通讯作者Yang, Weidong(weidong.yang@nus.edu.sg) ; Wei, Dapeng(dpwei@cigit.ac.cn)
英文摘要High-performance flexible pressure sensors are highly desirable in health monitoring, robotic tactile, and artificial intelligence. Construction of microstructures in dielectrics and electrodes is the dominating approach to improving the performance of capacitive pressure sensors. Herein, we have demonstrated a novel three-dimensional microconformal graphene electrode for ultrasensitive and tunable flexible capacitive pressure sensors. Because the fabrication process is controllable, the morphologies of the graphene that is perfectly conformal with the electrode are controllable consequently. Multiscale morphologies ranging from a few nanometers to hundreds of nanometers, even to tens of micrometers, have been systematically investigated, and the high-performance capacitive pressure sensor with high sensitivity (3.19 kPa(-1)), fast response (30 ms), ultralow detection limit (1 mg), tunable-sensitivity, high flexibility, and high stability was obtained. Furthermore, an ultrasensitivity of 7.68 kPa(-1) was successfully achieved via symmetric double microconformal graphene electrodes. The finite element analysis indicates that the microstructured graphene electrode can enhance large deformation and thus effectively improve the sensitivity. Additionally, the proposed pressure sensors are demonstrated with practical applications including insect crawling detection, wearable health monitoring, and force feedback of robot tactile sensing with a sensor array. The microconformal graphene may provide a new approach to fabricating controllable microstructured electrodes to enhance the performance of capacitive pressure sensors and has great potential for innovative applications in wearable health-monitoring devices, robot tactile systems, and human-machine interface systems.
资助项目National Natural Science Foundation of China[NSFC 61504148] ; Basic Science and Frontier Technology Research Program of Chongqing[cstc2016jcyjA0315] ; Basic Science and Frontier Technology Research Program of Chongqing[cstc2017shmsA50001] ; Youth Innovation Promotion Association of CAS[2015316] ; Project of Chongqing brain science Collaborative Innovation Center ; Project of CAS Western Young Scholar ; Project of CQCSTC[cstc2017zdcy-zdyfX0001]
WOS研究方向Science & Technology - Other Topics ; Materials Science
语种英语
WOS记录号WOS:000466052800052
出版者AMER CHEMICAL SOC
源URL[http://119.78.100.138/handle/2HOD01W0/7901]  
专题微纳制造与系统集成研究中心
通讯作者Yang, Weidong; Wei, Dapeng
作者单位1.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing Key Lab Multiscale Mfg Technol, Chongqing 400714, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 117576, Singapore
推荐引用方式
GB/T 7714		 Yang, Jun,Luo, Shi,Zhou, Xi,et al. Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes[J]. ACS APPLIED MATERIALS & INTERFACES,2019,11(16):14997-15006.
APA Yang, Jun.,Luo, Shi.,Zhou, Xi.,Li, Jialu.,Fu, Jianting.,...&Wei, Dapeng.(2019).Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes.ACS APPLIED MATERIALS & INTERFACES,11(16),14997-15006.
MLA Yang, Jun,et al."Flexible, Tunable, and Ultrasensitive Capacitive Pressure Sensor with Microconformal Graphene Electrodes".ACS APPLIED MATERIALS & INTERFACES 11.16(2019):14997-15006.

入库方式： OAI收割

来源：重庆绿色智能技术研究院

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