Preparation and Characterization of SiOx, Coating from Perhydropolysilazane
文献类型：期刊论文
| 作者 | Xiao Fengyan1,2; Zhang Zongbo1; Fan, Zeng1; Mei Xuening1; Luo Yongming1; Xu Caihong1 |
| 刊名 | RARE METAL MATERIALS AND ENGINEERING
 |
| 出版日期 | 2013-06-01 |
| 卷号 | 42页码:150-153 |
| 关键词 | Phps Polymer-derived Ceramics Siox Coating Optical Property Mechanical Property |
| ISSN号 | 1002-185X |
| 英文摘要 | Perhydropolysilazane (PHPS) was used as precursor for preparing SiOx coatings on Si(100) substrate at room temperature. The PHPS-to-silica conversion was achieved by exposing the spin-on coatings to the vapor from aqueous ammonia with a concentration of 5 mol/L. The conversion of the coating and corresponding properties at different treating time were studied. The results suggest that transparency of the coating obtained for various periods of time in the vapor of aqueous ammonia exceeds 95%, indicating that the coatings prepared with PHPS is highly transparent. As the exposer time increases, the refractive index decreases from 1.58 to 1.41, and the surface hardness and elastic modulus of the coatings increase to 3 GPa and 60 GPa, respectively. The coatings exposed to the vapor of aqueous ammonia for 4 h are identical to silica glass and the thickness of the obtained coatings is about 280 nm. |
| 语种 | 英语 |
| WOS记录号 | WOS:000323798200040 |
| 出版者 | NORTHWEST INST NONFERROUS METAL RESEARCH |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/54311]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Xu Caihong |
| 作者单位 | 1.Chinese Acad Sci, Inst Chem, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xiao Fengyan,Zhang Zongbo,Fan, Zeng,et al. Preparation and Characterization of SiOx, Coating from Perhydropolysilazane[J]. RARE METAL MATERIALS AND ENGINEERING,2013,42:150-153. |
| APA | Xiao Fengyan,Zhang Zongbo,Fan, Zeng,Mei Xuening,Luo Yongming,&Xu Caihong.(2013).Preparation and Characterization of SiOx, Coating from Perhydropolysilazane.RARE METAL MATERIALS AND ENGINEERING,42,150-153. |
| MLA | Xiao Fengyan,et al."Preparation and Characterization of SiOx, Coating from Perhydropolysilazane".RARE METAL MATERIALS AND ENGINEERING 42(2013):150-153. |
入库方式： OAI收割
来源：化学研究所
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