Solvent-assisted polymer-bonding lithography
文献类型：期刊论文
| 作者 | Luan, SF; Xing, RB; Wang, Z; Yu, XH; Han, YC |
| 刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
 |
| 出版日期 | 2005 |
| 卷号 | 23期号:1页码:236-241 |
| ISSN号 | 1071-1023 |
| 英文摘要 | Solvent-assisted polymer-bonding lithography based on surface adhesion to the transfer pattern between the polymer films is presented. Its primary feature is the application of solvent vapor to enhance the adhesion between the polymers on the elastomeric polydimethylsiloxane mold and the substrate. When the mold is lifted off, the pattern is transferred to the substrate, assuming that the work of adhesion of the polymer/mold and the polymer/substrate was permitted. Solvent-assisted polymer-bonding lithography can fabricate micrometer and submicron patterns between the same and different polymers on the planar and nonplanar substrates at low temperatures and pressures. (C) 2005 American Vacuum Society. |
| 语种 | 英语 |
| WOS记录号 | WOS:000227300900043 |
| 出版者 | A V S AMER INST PHYSICS |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/56567]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Han, YC |
| 作者单位 | Chinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China |
| 推荐引用方式 GB/T 7714 | Luan, SF,Xing, RB,Wang, Z,et al. Solvent-assisted polymer-bonding lithography[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2005,23(1):236-241. |
| APA | Luan, SF,Xing, RB,Wang, Z,Yu, XH,&Han, YC.(2005).Solvent-assisted polymer-bonding lithography.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,23(1),236-241. |
| MLA | Luan, SF,et al."Solvent-assisted polymer-bonding lithography".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 23.1(2005):236-241. |
入库方式： OAI收割
来源：化学研究所
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