Study on the preparation and properties of copper nitride thin films
文献类型：期刊论文
| 作者 | Yue, GH; Yan, PX; Wang, J |
| 刊名 | JOURNAL OF CRYSTAL GROWTH
 |
| 出版日期 | 2005-02-01 |
| 卷号 | 274期号:3-4页码:464-468 |
| 关键词 | Optical Recording Thermal Stability Copper Nitride Thin Film |
| ISSN号 | 0022-0248 |
| DOI | 10.1016/j.jcrysgro.2004.10.032 |
| 英文摘要 | Copper nitride (Cu3N) thin films were prepared on glass substrates by reactive radio-frequency (RF) magnetron sputtering tinder different nitrogen flow rate. The thermal stability of the Cu3N films was investigated through vacuum annealing treatment at different temperature. X-ray diffraction, scanning electron microscopy and near-normal reflectance spectra were employed to characterize the films. The deposited Cu3N films take on a different preferred orientation, which changed from (1 1 1) to (1 0 0) with increase of N-2 ratio. The grains size of thin films can become small when the N-2 ratio increases. The Cu3N phase can completely decompose into Cu and N-2 through vacuum annealing treatment at a temperature of 200degreesC. The reflectance of as-deposited Cu3N films is quite different from decomposed films. (C) 2004 Elsevier B.V. All rights reserved. |
| 语种 | 英语 |
| WOS记录号 | WOS:000226704900021 |
| 出版者 | ELSEVIER SCIENCE BV |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/57065]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Yan, PX |
| 作者单位 | 1.Lanzhou Univ, Inst Plasma & Met Mat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Inst Chem & Phys, Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yue, GH,Yan, PX,Wang, J. Study on the preparation and properties of copper nitride thin films[J]. JOURNAL OF CRYSTAL GROWTH,2005,274(3-4):464-468. |
| APA | Yue, GH,Yan, PX,&Wang, J.(2005).Study on the preparation and properties of copper nitride thin films.JOURNAL OF CRYSTAL GROWTH,274(3-4),464-468. |
| MLA | Yue, GH,et al."Study on the preparation and properties of copper nitride thin films".JOURNAL OF CRYSTAL GROWTH 274.3-4(2005):464-468. |
入库方式： OAI收割
来源：化学研究所
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