Catalyst-enhanced chemical vapor deposition of palladium-platinum bilayer films on polyimide
文献类型：期刊论文
| 作者 | Zheng Jianhua; Zhou Jinlan; Yu Kaichao; Ge Xuegui; Yu Shuyan |
| 刊名 | CHINESE JOURNAL OF CATALYSIS
 |
| 出版日期 | 2006-06-01 |
| 卷号 | 27期号:6页码:465-467 |
| 关键词 | Catalyst-enhanced Chemical Vapor Deposition Polyimide Platinum Film Palladium-platinum Bilayer Film |
| ISSN号 | 0253-9837 |
| 英文摘要 | Catalyst-enhanced chemical vapor deposition of Pt and Pd-Pt bilayer films on polyimide using N-2 and O-2 as the carrier gases was studied. When the mixture of Pt complex and Pd complex was used as precursors in the same chamber for co-deposition of Pd and Pt, only Pt was deposited. Sequential deposition of Pd and Pt metals formed Pd-Pt bilayer films. |
| 语种 | 英语 |
| WOS记录号 | WOS:000239190800003 |
| 出版者 | SCIENCE CHINA PRESS |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/58549]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Yu Kaichao |
| 作者单位 | 1.Huazhong Univ Sci & Technol, Dept Chem, Wuhan 430074, Hubei, Peoples R China 2.China Univ Geosci, Dept Mat Sci & Chem Engn, Wuhan 430074, Hubei, Peoples R China 3.Chinese Acad Sci, Inst Chem, State Key Lab Polymer Phys & Chem, Beijing 100080, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zheng Jianhua,Zhou Jinlan,Yu Kaichao,et al. Catalyst-enhanced chemical vapor deposition of palladium-platinum bilayer films on polyimide[J]. CHINESE JOURNAL OF CATALYSIS,2006,27(6):465-467. |
| APA | Zheng Jianhua,Zhou Jinlan,Yu Kaichao,Ge Xuegui,&Yu Shuyan.(2006).Catalyst-enhanced chemical vapor deposition of palladium-platinum bilayer films on polyimide.CHINESE JOURNAL OF CATALYSIS,27(6),465-467. |
| MLA | Zheng Jianhua,et al."Catalyst-enhanced chemical vapor deposition of palladium-platinum bilayer films on polyimide".CHINESE JOURNAL OF CATALYSIS 27.6(2006):465-467. |
入库方式： OAI收割
来源：化学研究所
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