Formation of palladium-platinum alloy films on polyimide by catalyst-enhanced chemical vapor deposition
文献类型：期刊论文
| 作者 | Yu, KC; Hamadan, Y; Cheng, YH; Zhou, JL; Li, ZJ; Yu, SY; Jiao, Q |
| 刊名 | CHINESE JOURNAL OF INORGANIC CHEMISTRY
 |
| 出版日期 | 2006-05-01 |
| 卷号 | 22期号:5页码:789-794 |
| 关键词 | Catalyst-enhanced Chemical Vapor Deposition Polyimide (Pi) Palladium-platinum Alloy |
| ISSN号 | 1001-4861 |
| 英文摘要 | Pd, Pt and their alloy films on polyimide were prepared by Catalyst-Enhanced Chemical Vapor Deposition (CECVD) under the carrier gas (N-2, O-2). Co-deposition of Pd and Pt complexes was used for deposition of alloy film. During the CVD of palladium-platinum alloy, the Pd/Pt atomic ratios varied with co-deposition conditions. Co-deposition of Pd(eta(3)-allyl)(hfac) and Pt(COD)Me-2 under O-2 at 300 degrees C produced palladium-platinum alloy containing palladium of 37.2% and platinum of 62.8%, respectively without the contamination of carbon and fluorine. |
| 语种 | 英语 |
| WOS记录号 | WOS:000237723700003 |
| 出版者 | CHINESE CHEMICAL SOCIETY |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/59489]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Zhou, JL |
| 作者单位 | 1.Huazhong Univ Sci & Technol, Dept Chem, Wuhan 430074, Peoples R China 2.Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China 3.Chinese Acad Sci, Inst Chem, State Key Lab Polymer Phys & Chem, Beijing 100080, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, KC,Hamadan, Y,Cheng, YH,et al. Formation of palladium-platinum alloy films on polyimide by catalyst-enhanced chemical vapor deposition[J]. CHINESE JOURNAL OF INORGANIC CHEMISTRY,2006,22(5):789-794. |
| APA | Yu, KC.,Hamadan, Y.,Cheng, YH.,Zhou, JL.,Li, ZJ.,...&Jiao, Q.(2006).Formation of palladium-platinum alloy films on polyimide by catalyst-enhanced chemical vapor deposition.CHINESE JOURNAL OF INORGANIC CHEMISTRY,22(5),789-794. |
| MLA | Yu, KC,et al."Formation of palladium-platinum alloy films on polyimide by catalyst-enhanced chemical vapor deposition".CHINESE JOURNAL OF INORGANIC CHEMISTRY 22.5(2006):789-794. |
入库方式： OAI收割
来源：化学研究所
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