Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering
文献类型：期刊论文
| 作者 | Yuan, XM; Yan, PX; Liu, JZ |
| 刊名 | MATERIALS LETTERS
 |
| 出版日期 | 2006-07-01 |
| 卷号 | 60期号:15页码:1809-1812 |
| 关键词 | Copper Nitride Film Surface Morphology Electrical Resistivity Optical Energy Gap |
| ISSN号 | 0167-577X |
| DOI | 10.1016/j.matlet.2005.12.028 |
| 英文摘要 | The semiconducting Cu3N films were successfully deposited on glass substrates by reactive radio-frequency magnetron sputtering in a mixture gas of nitrogen and argon. The influence of nitrogen content in a fixed total sputtering gas flow on the preferential crystalline orientation, the mean crystalline grains size, the electrical resistivity, and the optical energy gap of as-deposited films were investigated. X-ray diffraction analysis shows that the films were polycrystalline Cu3N and the preferential orientation is greatly affected by the N-2 content. All the Cu3N films have smooth surfaces with dense and continuous microstructure. The electrical resistivity and the optical energy gap of these as-deposited Cu3N films were measured to be in the range of 1.51 x 10(2)-1.129 x 10(3) Omega cm, and 1.34-1.75 eV, respectively. (c) 2005 Elsevier BY. All rights reserved. |
| 语种 | 英语 |
| WOS记录号 | WOS:000237158200008 |
| 出版者 | ELSEVIER SCIENCE BV |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/60105]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Yan, PX |
| 作者单位 | 1.Lanzhou Univ, Inst Plasma & Met Mat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Inst Chem & Phys, Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yuan, XM,Yan, PX,Liu, JZ. Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering[J]. MATERIALS LETTERS,2006,60(15):1809-1812. |
| APA | Yuan, XM,Yan, PX,&Liu, JZ.(2006).Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering.MATERIALS LETTERS,60(15),1809-1812. |
| MLA | Yuan, XM,et al."Preparation and characterization of copper nitride films at various nitrogen contents by reactive radio-frequency magnetron sputtering".MATERIALS LETTERS 60.15(2006):1809-1812. |
入库方式： OAI收割
来源：化学研究所
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