中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature

文献类型:期刊论文

作者Zhao, Jianying; Shang, Zhenping; Gao, Lianxun
刊名SENSORS AND ACTUATORS A-PHYSICAL
出版日期2007-03-30
卷号135期号:1页码:257-261
关键词Bonding Atrp Microfluidics Chip
ISSN号0924-4247
DOI10.1016/j.sna.2006.06.070
英文摘要In this paper, we presented a novel covalent bonding process between two quartz wafers at 300 degrees C. High-quality wafer bonding was formed by the hydroxylization, aminosilylation and atom transfer radical polymerization (ATRP) of glycidyl methacrylate (GMA), respectively, on quartz wafer surfaces, followed by close contact of the GMA functional wafer and the aminosilylation wafer, the epoxy group opening ring reaction was catalyzed by the amino and solidified to form the covalent bonding of the quartz wafers. The shear force between two wafers in all bonding samples was higher than 1.5 MPa. Microfluidic chips bonded by the above procedures had high transparency and the present procedure avoided the adhesive to block or flow into the channel. (c) 2006 Elsevier B.V. All rights reserved.
语种英语
WOS记录号WOS:000245796300039
出版者ELSEVIER SCIENCE SA
源URL[http://ir.iccas.ac.cn/handle/121111/62897]  
专题中国科学院化学研究所
通讯作者Gao, Lianxun
作者单位1.Chinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Jilin Province, Peoples R China
2.Chinese Acad Sci, Grad Sch, Changchun 130022, Jilin Province, Peoples R China
3.Shandong Univ Technol, Coll Chem Engn, Zibo 255049, Shandong, Peoples R China
推荐引用方式
GB/T 7714
Zhao, Jianying,Shang, Zhenping,Gao, Lianxun. Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature[J]. SENSORS AND ACTUATORS A-PHYSICAL,2007,135(1):257-261.
APA Zhao, Jianying,Shang, Zhenping,&Gao, Lianxun.(2007).Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature.SENSORS AND ACTUATORS A-PHYSICAL,135(1),257-261.
MLA Zhao, Jianying,et al."Bonding quartz wafers by the atom transfer radical polymerization of the glycidyl methacrylate at mild temperature".SENSORS AND ACTUATORS A-PHYSICAL 135.1(2007):257-261.

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来源:化学研究所

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