Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma
文献类型:期刊论文
作者 | Zheng, Jie1; Song, Xubo1; Li, Xingguo1,2; Pu, Yikang3 |
刊名 | JOURNAL OF PHYSICAL CHEMISTRY C
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出版日期 | 2008-01-10 |
卷号 | 112期号:1页码:27-34 |
ISSN号 | 1932-7447 |
DOI | 10.1021/jp075313w |
英文摘要 | Amorphous silicon oxynitrides (a-SiOxNy) were prepared through thermal treatment of nickel coated silicon wafers in NH3 plasma. Ni-Si alloy nanoparticles were formed at elevated temperature and served as the Si transfer medium from silicon wafers to nanowires. Without plasma, either amorphous silica (a-SiOx) nanowires or NiO polyhedral nanoparticles were obtained. Both the active hydrogen and nitrogen species generated in the NH3 plasma were essential for a-SiOxNy nanowire formation: the former one kept the activity of the catalyst while the later one ensured efficient nitrogen incorporation. Two factors were found to be essential for nanowire growth: the elemental state of Ni and sufficient active species in the gas phase. The Fourier transformed infrared (FT-IR) and Raman spectra of the obtained a-SiNxOy nanowires were studied. |
语种 | 英语 |
WOS记录号 | WOS:000252122600005 |
出版者 | AMER CHEMICAL SOC |
源URL | [http://ir.iccas.ac.cn/handle/121111/65565] ![]() |
专题 | 中国科学院化学研究所 |
通讯作者 | Li, Xingguo |
作者单位 | 1.Peking Univ, BNLMS, State Key Lab Rare Earth Mat Chem & Appl, Coll Chem & Mol Engn, Beijing 100871, Peoples R China 2.Peking Univ, Coll Engn, Beijing 100871, Peoples R China 3.Tsing Hua Univ, Dept Engn Phys, Beijing 100084, Peoples R China |
推荐引用方式 GB/T 7714 | Zheng, Jie,Song, Xubo,Li, Xingguo,et al. Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma[J]. JOURNAL OF PHYSICAL CHEMISTRY C,2008,112(1):27-34. |
APA | Zheng, Jie,Song, Xubo,Li, Xingguo,&Pu, Yikang.(2008).Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma.JOURNAL OF PHYSICAL CHEMISTRY C,112(1),27-34. |
MLA | Zheng, Jie,et al."Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma".JOURNAL OF PHYSICAL CHEMISTRY C 112.1(2008):27-34. |
入库方式: OAI收割
来源:化学研究所
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