中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma

文献类型:期刊论文

作者Zheng, Jie1; Song, Xubo1; Li, Xingguo1,2; Pu, Yikang3
刊名JOURNAL OF PHYSICAL CHEMISTRY C
出版日期2008-01-10
卷号112期号:1页码:27-34
ISSN号1932-7447
DOI10.1021/jp075313w
英文摘要Amorphous silicon oxynitrides (a-SiOxNy) were prepared through thermal treatment of nickel coated silicon wafers in NH3 plasma. Ni-Si alloy nanoparticles were formed at elevated temperature and served as the Si transfer medium from silicon wafers to nanowires. Without plasma, either amorphous silica (a-SiOx) nanowires or NiO polyhedral nanoparticles were obtained. Both the active hydrogen and nitrogen species generated in the NH3 plasma were essential for a-SiOxNy nanowire formation: the former one kept the activity of the catalyst while the later one ensured efficient nitrogen incorporation. Two factors were found to be essential for nanowire growth: the elemental state of Ni and sufficient active species in the gas phase. The Fourier transformed infrared (FT-IR) and Raman spectra of the obtained a-SiNxOy nanowires were studied.
语种英语
WOS记录号WOS:000252122600005
出版者AMER CHEMICAL SOC
源URL[http://ir.iccas.ac.cn/handle/121111/65565]  
专题中国科学院化学研究所
通讯作者Li, Xingguo
作者单位1.Peking Univ, BNLMS, State Key Lab Rare Earth Mat Chem & Appl, Coll Chem & Mol Engn, Beijing 100871, Peoples R China
2.Peking Univ, Coll Engn, Beijing 100871, Peoples R China
3.Tsing Hua Univ, Dept Engn Phys, Beijing 100084, Peoples R China
推荐引用方式
GB/T 7714
Zheng, Jie,Song, Xubo,Li, Xingguo,et al. Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma[J]. JOURNAL OF PHYSICAL CHEMISTRY C,2008,112(1):27-34.
APA Zheng, Jie,Song, Xubo,Li, Xingguo,&Pu, Yikang.(2008).Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma.JOURNAL OF PHYSICAL CHEMISTRY C,112(1),27-34.
MLA Zheng, Jie,et al."Large-scale production of amorphous silicon oxynitride nanowires by nickel-catalyzed transformation of silicon wafers in NH3 plasma".JOURNAL OF PHYSICAL CHEMISTRY C 112.1(2008):27-34.

入库方式: OAI收割

来源:化学研究所

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