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Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature

文献类型：期刊论文

作者Ma, Yanhong1; Liu, Fengzhen1; Zhu, Meifang1; Liu, Jinlong1; Wang, Huan-hua2; Yang, Yi3; Li, Yongfang3
刊名NANOTECHNOLOGY
出版日期2009-07-08
卷号20期号:27
ISSN号0957-4484
DOI10.1088/0957-4484/20/27/275201
英文摘要Aligned amorphous and crystallized silicon nanorods (SiNRs) were successfully fabricated at low temperatures using radio frequency magnetron sputtering and hot wire chemical vapor deposition with glancing angle incident flux. The influences of the deposition pressure, sputtering power, substrate rotation and hydrogen dilution ratio on the diameter, density, orientation and crystallization of the Si nanorods were systematically investigated. With increasing sputtering power, the density of Si nanorods decreases and the diameter of SiNRs increases. The pressure has the opposite effect on the growth of SiNRs compared with the sputtering power. By combining glancing angle deposition ( GLAD) with the hydrogen diluted silane in hot wire chemical vapor deposition (HWCVD), aligned crystallized Si nanorods with a crystalline volume fraction of 0.55 were achieved under a substrate temperature of 140 degrees C. The Si nanorods have been tested for photovoltaic application.
语种英语
WOS记录号WOS:000267089600003
出版者IOP PUBLISHING LTD
源URL[http://ir.iccas.ac.cn/handle/121111/66767]  
专题中国科学院化学研究所
通讯作者Ma, Yanhong
作者单位1.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
2.Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China
3.Chinese Acad Sci, Inst Chem, Beijing 100190, Peoples R China
推荐引用方式
GB/T 7714		 Ma, Yanhong,Liu, Fengzhen,Zhu, Meifang,et al. Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature[J]. NANOTECHNOLOGY,2009,20(27).
APA Ma, Yanhong.,Liu, Fengzhen.,Zhu, Meifang.,Liu, Jinlong.,Wang, Huan-hua.,...&Li, Yongfang.(2009).Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature.NANOTECHNOLOGY,20(27).
MLA Ma, Yanhong,et al."Aligned amorphous and microcrystalline Si nanorods by glancing angle deposition at low temperature".NANOTECHNOLOGY 20.27(2009).

入库方式： OAI收割

来源：化学研究所

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