中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effects of Diazonaphthoquinone Groups on Photosensitive Coating

文献类型:期刊论文

作者Zhou, Haihua1,2; Zou, Yingquan1; Song, Yanlin2
刊名JOURNAL OF APPLIED POLYMER SCIENCE
出版日期2010-08-15
卷号117期号:4页码:2360-2365
关键词Lithography Photosensitive Coating Diazonaphthoquinone Group Novolak Resin Esterification Degree
ISSN号0021-8995
DOI10.1002/app.32156
英文摘要Diazonaphthoquinone (DNQ)-novolak photosensitive materials are important in lithography. DNQ groups play an important role in the photosensitive coating. However, there are no reports on the relationship between content of DNQ groups and properties of the coating. The properties include alkali resistance, isopropanol resistance, and abrasion resistance, the key factors in lithography. The experimental results show proper content of DNQ groups can ensure higher sensitivity, finer resolution, and better abrasion resistance in lithography. (C) 2010 Wiley Periodicals, Inc. J Appl Polym Sci 117: 2360-2365, 2010
语种英语
WOS记录号WOS:000278886900064
出版者JOHN WILEY & SONS INC
源URL[http://ir.iccas.ac.cn/handle/121111/69647]  
专题中国科学院化学研究所
通讯作者Zou, Yingquan
作者单位1.Beijing Normal Univ, Coll Chem, Beijing 100875, Peoples R China
2.Chinese Acad Sci, New Mat Lab, Inst Chem, Beijing Natl Lab Mol Sci, Beijing 100190, Peoples R China
推荐引用方式
GB/T 7714
Zhou, Haihua,Zou, Yingquan,Song, Yanlin. Effects of Diazonaphthoquinone Groups on Photosensitive Coating[J]. JOURNAL OF APPLIED POLYMER SCIENCE,2010,117(4):2360-2365.
APA Zhou, Haihua,Zou, Yingquan,&Song, Yanlin.(2010).Effects of Diazonaphthoquinone Groups on Photosensitive Coating.JOURNAL OF APPLIED POLYMER SCIENCE,117(4),2360-2365.
MLA Zhou, Haihua,et al."Effects of Diazonaphthoquinone Groups on Photosensitive Coating".JOURNAL OF APPLIED POLYMER SCIENCE 117.4(2010):2360-2365.

入库方式: OAI收割

来源:化学研究所

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