Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip
文献类型：期刊论文
| 作者 | Zhang Y(张吟)
|
| 刊名 | Journal of Applied Mechanics-Transactions of the ASME
 |
| 出版日期 | 2008 |
| 关键词 | Compressed Elastic Film Thin-Films Viscous Layer Wafer Fusion Stress Beam Semiconductors Technology Extension Adhesion |
| ISSN号 | 0021-8936 |
| 通讯作者 | Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China. |
| 中文摘要 | The curvature-stress relation is studied for a film-substrate bilayer with the effect of interfacial slip and compared with that of an ideal interface without interfacial slip. The interfacial slip together with the dimensions, elastic and interfacial properties of the film and substrate layers can cause a significant deviation of curvature-stress relation from that with an ideal interface. The interfacial slip also results in the so-called free edge effect that the stress, constraint force, and curvature vary dramatically around the free edges. The constant curvature as predicted by Stoney's formula and the Timoshenko model of an ideal interface is no longer valid for a bilayer with a nonideal interface. The models with the assumption of an ideal interface can also lead to an erroneous evaluation on the true stress state inside a bilayer with a nonideal interface. The extended Stoney's formula incorporating the effects of both the layer dimensions and interfacial slip is presented. |
| 类目[WOS] | Mechanics |
| 研究领域[WOS] | Mechanics |
| 关键词[WOS] | COMPRESSED ELASTIC FILM ; THIN-FILMS ; VISCOUS LAYER ; WAFER FUSION ; STRESS ; BEAM ; SEMICONDUCTORS ; TECHNOLOGY ; EXTENSION ; ADHESION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000255132400008 |
| 公开日期 | 2009-08-03 ; 2009-09-14 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/26062]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Zhang Y. Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip[J]. Journal of Applied Mechanics-Transactions of the ASME,2008. |
| APA | 张吟.(2008).Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip.Journal of Applied Mechanics-Transactions of the ASME. |
| MLA | 张吟."Extended Stoney'S Formula For A Film-Substrate Bilayer With The Effect Of Interfacial Slip".Journal of Applied Mechanics-Transactions of the ASME (2008). |
入库方式： OAI收割
来源：力学研究所
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