Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate
文献类型：期刊论文
| 作者 | Yu, Xinhong; Wang, Zhe; Yu, Sunyang; Ma, Dongge; Han, Yanchun |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2011-09-01 |
| 卷号 | 257期号:22页码:9264-9268 |
| 关键词 | Hot Lift-off Polymer Bonding Lithography |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2011.05.006 |
| 英文摘要 | Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of OFETs with polymeric dielectric on the flexible substrate was proposed. The desired polymeric semiconductor patterns were fabricated on the flat polydimethylsiloxane (PDMS) surface with a selective lift-off method we proposed previously. The isolated and well defined polymeric semiconductor patterns left on the flat PDMS surface can be further transferred to the gate polymeric dielectric surface by polymer bonding lithography due to the low interfacial energy of PDMS. The transistor fabricated with this 'dry' process has a higher field-effect mobility compared with that using spin coated semiconductor layer. (C) 2011 Elsevier B.V. All rights reserved. |
| 语种 | 英语 |
| WOS记录号 | WOS:000293590300006 |
| 出版者 | ELSEVIER SCIENCE BV |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/73315]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Han, Yanchun |
| 作者单位 | Chinese Acad Sci, Changchun Inst Appl Chem, State Key Lab Polymer Phys & Chem, Changchun 130022, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yu, Xinhong,Wang, Zhe,Yu, Sunyang,et al. Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate[J]. APPLIED SURFACE SCIENCE,2011,257(22):9264-9268. |
| APA | Yu, Xinhong,Wang, Zhe,Yu, Sunyang,Ma, Dongge,&Han, Yanchun.(2011).Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate.APPLIED SURFACE SCIENCE,257(22),9264-9268. |
| MLA | Yu, Xinhong,et al."Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate".APPLIED SURFACE SCIENCE 257.22(2011):9264-9268. |
入库方式： OAI收割
来源：化学研究所
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