中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders

文献类型:期刊论文

作者Shao, LX; Xie, EQ; He, DY; Chen, GH; Xu, K
刊名JOURNAL OF INORGANIC MATERIALS
出版日期1998-12-01
卷号13期号:6页码:927-931
关键词Cvd Diamond Nucleation Pretreatment Of Substrate Nanodiamond Powder
ISSN号1000-324X
英文摘要Ultradispersed nanodiamond powder synthesized by explosive detonation was used for the pretreatment of mirror Si substrate for nucleation and growth of diamond by microwave plasma-CVD. Compared with the scratching pretreatment, it is found that the pretreatment method by coating substrate with the slurry loading nanodiamond powder not only enhances both of density (up to 10(9) cm(-2)) and nucleation rate, improving the quality of grown-up him greatly, but also controls, nucleation easily. In addition, this pretreatment is also very cost-effective, non-damaging, and reproducible as well.
语种英语
WOS记录号WOS:000077808800030
出版者SCIENCE PRESS
源URL[http://ir.iccas.ac.cn/handle/121111/74199]  
专题中国科学院化学研究所
通讯作者Shao, LX
作者单位1.Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China
2.Beijing Polytech Univ, Dept Appl Phys, Beijing 100022, Peoples R China
3.Chinese Acad Sci, Inst Chem & Phys, Lanzhou 730000, Peoples R China
推荐引用方式
GB/T 7714
Shao, LX,Xie, EQ,He, DY,et al. Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders[J]. JOURNAL OF INORGANIC MATERIALS,1998,13(6):927-931.
APA Shao, LX,Xie, EQ,He, DY,Chen, GH,&Xu, K.(1998).Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders.JOURNAL OF INORGANIC MATERIALS,13(6),927-931.
MLA Shao, LX,et al."Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders".JOURNAL OF INORGANIC MATERIALS 13.6(1998):927-931.

入库方式: OAI收割

来源:化学研究所

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