Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders
文献类型:期刊论文
作者 | Shao, LX; Xie, EQ; He, DY; Chen, GH; Xu, K |
刊名 | JOURNAL OF INORGANIC MATERIALS
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出版日期 | 1998-12-01 |
卷号 | 13期号:6页码:927-931 |
关键词 | Cvd Diamond Nucleation Pretreatment Of Substrate Nanodiamond Powder |
ISSN号 | 1000-324X |
英文摘要 | Ultradispersed nanodiamond powder synthesized by explosive detonation was used for the pretreatment of mirror Si substrate for nucleation and growth of diamond by microwave plasma-CVD. Compared with the scratching pretreatment, it is found that the pretreatment method by coating substrate with the slurry loading nanodiamond powder not only enhances both of density (up to 10(9) cm(-2)) and nucleation rate, improving the quality of grown-up him greatly, but also controls, nucleation easily. In addition, this pretreatment is also very cost-effective, non-damaging, and reproducible as well. |
语种 | 英语 |
WOS记录号 | WOS:000077808800030 |
出版者 | SCIENCE PRESS |
源URL | [http://ir.iccas.ac.cn/handle/121111/74199] ![]() |
专题 | 中国科学院化学研究所 |
通讯作者 | Shao, LX |
作者单位 | 1.Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China 2.Beijing Polytech Univ, Dept Appl Phys, Beijing 100022, Peoples R China 3.Chinese Acad Sci, Inst Chem & Phys, Lanzhou 730000, Peoples R China |
推荐引用方式 GB/T 7714 | Shao, LX,Xie, EQ,He, DY,et al. Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders[J]. JOURNAL OF INORGANIC MATERIALS,1998,13(6):927-931. |
APA | Shao, LX,Xie, EQ,He, DY,Chen, GH,&Xu, K.(1998).Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders.JOURNAL OF INORGANIC MATERIALS,13(6),927-931. |
MLA | Shao, LX,et al."Nucleation and growth of CVD diamond films on smooth Si substrate pretreated by nanodiamond powders".JOURNAL OF INORGANIC MATERIALS 13.6(1998):927-931. |
入库方式: OAI收割
来源:化学研究所
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