AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition
文献类型：期刊论文
| 作者 | Li, MC; Zhao, LC; Cai, W; Liu, D; Chen, XK |
| 刊名 | JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2002 |
| 卷号 | 18期号:1页码:24-26 |
| 关键词 | Ptsi Thin Films Pld Afm |
| ISSN号 | 1005-0302 |
| 英文摘要 | PtSi ultra-thin films were grown on Si-wafer using pulsed laser deposition (PLD). The surface structure of these films was studied by atomic force microscopy (AFM). In addition, the compositional structure of the PtSi as determined from X-ray photoelectron spectroscopy (XPS) is discussed. First report of a possible growth mechanism is presented, on studying the variation of morphological features (i.e., roughness and size of crystallites) with annealing temperatures and the film thicknesses. |
| 语种 | 英语 |
| WOS记录号 | WOS:000173663400008 |
| 出版者 | JOURNAL MATER SCI TECHNOL |
| 源URL | [http://ir.iccas.ac.cn/handle/121111/78531]  |
| 专题 | 中国科学院化学研究所 |
| 通讯作者 | Li, MC |
| 作者单位 | 1.Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China 2.Chinese Acad Sci, Inst Chem, STM Lab, Beijing 100080, Peoples R China 3.Chinese Acad Sci, Lanzhou Inst Phys, Lab Laser Mol Beam Epitaxy, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, MC,Zhao, LC,Cai, W,et al. AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition[J]. JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,2002,18(1):24-26. |
| APA | Li, MC,Zhao, LC,Cai, W,Liu, D,&Chen, XK.(2002).AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition.JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY,18(1),24-26. |
| MLA | Li, MC,et al."AFM studies of platinum silicide thin films on silicon grown by pulsed laser deposition".JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY 18.1(2002):24-26. |
入库方式： OAI收割
来源：化学研究所
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