Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression
文献类型：期刊论文
| 作者 | Deng, Qinyuan1,2; Liu, Junbo1; Tang, Yan3; Zhou, Yi1; Yang, Yong1; Li, Jinlong1; Hu, Song1 |
| 刊名 | IEEE PHOTONICS TECHNOLOGY LETTERS
 |
| 出版日期 | 2018-02-15 |
| 卷号 | 30期号:4页码:379-382 |
| ISSN号 | 1041-1135 |
| 关键词 | Surface measurement noise suppression spatial modulation |
| DOI | 10.1109/LPT.2017.2787100 |
| 文献子类 | J |
| 英文摘要 | A route of spatial modulation-assisted scanning white-light interferometry with the inhibition of background noises and light source fluctuations for the topography measurement of micro-/nano-structure surface was explored in this letter. The spatial modulation frequency was introduced by tilting the sample at a small angle to separate the noise signals and interference signals in the spatial frequency domain. A band-pass filter and a normalization processing were also applied with the purpose of signal-to-noise-ratio improvement and contrast enhancement. The frequency domain analysis was then enrolled in the elimination of 2 pi ambiguity for the surface recovery with high-presicion. Both the theoretical analysis and the experiment results reveal the validity of spatial modulation-assisted scanning white-light interferometry and its potentials in high-fidelity measurement of smooth surfaces regardless of external disturbances. |
| WOS关键词 | PHASE-SHIFTING ALGORITHMS ; FRINGE-ORDER DETERMINATION ; MEASUREMENT UNCERTAINTY ; ROUGH SURFACES |
| 语种 | 英语 |
| WOS记录号 | WOS:000424058900021 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9285]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.University of Chinese Academy of Sciences, Beijing; 100049, China; 2.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 3.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Deng, Qinyuan,Liu, Junbo,Tang, Yan,et al. Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2018,30(4):379-382. |
| APA | Deng, Qinyuan.,Liu, Junbo.,Tang, Yan.,Zhou, Yi.,Yang, Yong.,...&Hu, Song.(2018).Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression.IEEE PHOTONICS TECHNOLOGY LETTERS,30(4),379-382. |
| MLA | Deng, Qinyuan,et al."Spatial Modulation-Assisted Scanning White-Light Interferometry for Noise Suppression".IEEE PHOTONICS TECHNOLOGY LETTERS 30.4(2018):379-382. |
入库方式： OAI收割
来源：光电技术研究所
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