Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source
文献类型：期刊论文
| 作者 | Cao, Axiu1,2; Pang, Hui1; Wang, Jiazhou1,2; Shi, Lifang1; Deng, Qiling1; Hu, Song1 |
| 刊名 | MICROMACHINES
 |
| 出版日期 | 2018-06-01 |
| 卷号 | 9期号:6页码:256 |
| 关键词 | microfabrication microwell arrays speckle light source pseudo-thermal source |
| ISSN号 | 2072-666X |
| DOI | 10.3390/mi9060256 |
| 文献子类 | J |
| 英文摘要 | Quantum correlated imaging using the intensity fluctuations of thermal light possesses advantages of high resolution and strong anti-interference ability. The common method to produce pseudo-thermal light source is using a rotary ground glass and transmission of laser beam. In the present work, we propose a method for the fabrication of microwell arrays with randomly varied diameters, which could be used as a new structural element for pseudo-thermal speckle light source. If these are etched with random sizes then they may also have random and complex varying curvatures (diffusion limited etching) leading to random destructive interference of the coherent beam which could be a good thing. The microwell arrays, with diameters randomly varying from 5 m to 40 m, height varying from 200 nm to 20 m, were fabricated by photolithography combined with acid etching. The experimental conditions are simple and can be scaled up to for large structures. The produced microwell arrays can transform the laser beam to a pseudo-thermal light source with a certain divergent angle by rational designing of mask and adjustable process parameters. |
| WOS关键词 | IMAGE |
| 语种 | 英语 |
| WOS记录号 | WOS:000436506300002 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9312]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
| 推荐引用方式 GB/T 7714 | Cao, Axiu,Pang, Hui,Wang, Jiazhou,et al. Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source[J]. MICROMACHINES,2018,9(6):256. |
| APA | Cao, Axiu,Pang, Hui,Wang, Jiazhou,Shi, Lifang,Deng, Qiling,&Hu, Song.(2018).Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source.MICROMACHINES,9(6),256. |
| MLA | Cao, Axiu,et al."Fabrication of Random Microwell Arrays as Pseudo-Thermal Speckle Light Source".MICROMACHINES 9.6(2018):256. |
入库方式： OAI收割
来源：光电技术研究所
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