Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator
文献类型：会议论文
| 作者 | Ma, Wenying1; Ma, Changwei1; Wang, Weimin2 |
| 出版日期 | 2018 |
| 会议日期 | OCT 26-29, 2017OCT 26-29, 2017 |
| 会议地点 | Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA |
| 关键词 | Adaptive optics Deformation Delta modulation Electromechanical devices Laser pulses MEMS Mirrors Structural design Surface micromachining |
| 卷号 | 986 |
| DOI | 10.1088/1742-6596/986/1/012021 |
| 页码 | 12021 |
| 英文摘要 | Deformable mirrors (DM) based on microelectromechanical system (MEMS) technology are being applied in adaptive optics (AO) system for astronomical telescopes and human eyes more and more. In this paper a MEMS DM with hexagonal actuator is proposed and designed. The relationship between structural design and performance parameters, mainly actuator coupling, is analyzed carefully and calculated. The optimum value of actuator coupling is obtained. A 7-element DM prototype is fabricated using a commercial available standard three-layer poly silicon surface multi-user-MEMS-processes (PolyMUMPs). Some key performances, including surface figure and voltage-displacement curve, are measured through a 3D white light profiler. The measured performances are very consistent with the theoretical values. The proposed DM will benefit the miniaturization of AO systems and lower their cost. |
| 会议录 | Journal of Physics Conference Series (IOP): 19TH ANNUAL CONFERENCE AND 8TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY (CSMNT2017)
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| 文献子类 | C |
| 语种 | 英语 |
| ISSN号 | 1742-6588 |
| WOS记录号 | WOS:000445813800021 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9123]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.College of Communication Engineering, Chengdu University of Information Technology, Chengdu; 610225, China; 2.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Science, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Ma, Wenying,Ma, Changwei,Wang, Weimin. Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator[C]. 见:. Dalian, PEOPLES R CHINADalian, PEOPLES R CHINA. OCT 26-29, 2017OCT 26-29, 2017. |
入库方式： OAI收割
来源：光电技术研究所
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