The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering
文献类型：期刊论文
| 作者 | Tang, Ping1,2; Li, Bing2; Feng, Lianghuan2 |
| 刊名 | CERAMICS INTERNATIONAL
 |
| 出版日期 | 2018-03-01 |
| 卷号 | 44期号:4页码:4154-4157 |
| 关键词 | ZnO:Al films Magnetron sputtering Low substrate temperatures |
| ISSN号 | 0272-8842 |
| DOI | 10.1016/j.ceramint.2017.11.216 |
| 文献子类 | J |
| 英文摘要 | Several ZnO:Al thin films have been successfully deposited on glass substrates at different substrate temperatures by RF (radio frequency) magnetron sputtering method. Effects of the substrate temperatures on the optical and electrical properties of these ZnO:Al thin films were investigated. The UV-VIS-NIR spectra of the ZnO:Al thin films revealed that the average optical transmittances in the visible range are very high, up to 88%. X-ray diffraction results showed that crystallization of these films was improved at higher substrate temperature. The band gaps of ZnO:Al thin films deposited at 25 degrees C, 150 degrees C, 200 degrees C, and 250 degrees C are 3.59 eV, 3.55 eV, 3.53 eV, and 3.48 eV, respectively. The Hall-effect measurement demonstrated that the electrical resistivity of the films decreased with the increase of the substrate temperature and the electrical resistivity reached 1.990 x 10(-3) Omega cm at 250 degrees C. |
| WOS关键词 | PULSED-LASER DEPOSITION ; SURFACE ; GLASS |
| 语种 | 英语 |
| WOS记录号 | WOS:000424716200083 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9269]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu; 610209, China; 2.College of Materials Science and Engineering, Sichuan University, Chengdu; 610064, China |
| 推荐引用方式 GB/T 7714 | Tang, Ping,Li, Bing,Feng, Lianghuan. The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering[J]. CERAMICS INTERNATIONAL,2018,44(4):4154-4157. |
| APA | Tang, Ping,Li, Bing,&Feng, Lianghuan.(2018).The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering.CERAMICS INTERNATIONAL,44(4),4154-4157. |
| MLA | Tang, Ping,et al."The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering".CERAMICS INTERNATIONAL 44.4(2018):4154-4157. |
入库方式： OAI收割
来源：光电技术研究所
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