Plasmonic direct writing lithography with a macroscopical contact probe
文献类型：期刊论文
| 作者 | Huang, Yuerong1; Liu, Ling2; Wang, Changtao2; Chen, Weidong1; Liu, Yunyue1; Li, Ling1 |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2018-05-31 |
| 卷号 | 441页码:99-104 |
| 关键词 | Nanolithography Surface plasmons Nanostructure Contact probe |
| ISSN号 | 0169-4332 |
| DOI | 10.1016/j.apsusc.2018.01.304 |
| 文献子类 | J |
| 英文摘要 | In this work, we design a plasmonic direct writing lithography system with a macroscopical contact probe to achieve nanometer scale spots. The probe with bowtie-shaped aperture array adopts spring hinge and beam deflection method (BDM) to realize near-field lithography. Lithography results show that a macroscopical plasmonic contact probe can achieve a patterning resolution of around 75 nm at 365 nm wavelength, and demonstrate that the lithography system is promising for practical applications due to beyond the diffraction limit, low cost, and simplification of system configuration. CST calculations provide a guide for the design of recording structure and the arrangement of placing polarizer. (C) 2018 Elsevier B.V. All rights reserved. |
| 语种 | 英语 |
| WOS记录号 | WOS:000427816400012 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9379]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.College of Physics and Electronic Engineering, Sichuan Normal University, Chengdu; 610101, China; 2.State Key Laboratory of Optical Technologies on Nano-Fabricatiom and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu; 610209, China |
| 推荐引用方式 GB/T 7714 | Huang, Yuerong,Liu, Ling,Wang, Changtao,et al. Plasmonic direct writing lithography with a macroscopical contact probe[J]. APPLIED SURFACE SCIENCE,2018,441:99-104. |
| APA | Huang, Yuerong,Liu, Ling,Wang, Changtao,Chen, Weidong,Liu, Yunyue,&Li, Ling.(2018).Plasmonic direct writing lithography with a macroscopical contact probe.APPLIED SURFACE SCIENCE,441,99-104. |
| MLA | Huang, Yuerong,et al."Plasmonic direct writing lithography with a macroscopical contact probe".APPLIED SURFACE SCIENCE 441(2018):99-104. |
入库方式： OAI收割
来源：光电技术研究所
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