中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Precise phase demodulation of single carrier-frequency interferogram by pixel-level Lissajous figure and ellipse fitting

文献类型:期刊论文

作者Liu, Fengwei; Wu, Yongqian; Wu, Fan; Koenig, Niels; Schmitt, Robert; Wan, Yongjian; Xu, Yan
刊名SCIENTIFIC REPORTS
出版日期2018-01-09
卷号8页码:148
ISSN号2045-2322
DOI10.1038/s41598-017-18031-4
文献子类J
英文摘要Phase demodulation from a single carrier-frequency fringe pattern is becoming increasingly important particularly in areas of optical metrology such as dynamic interferometry, deflectometry and profilometry. The Fourier transform (FT) method and the spatial-carrier phase-shifting technique (SCPS) are two popular and well-established approaches to demodulation. However FT has the drawback of significant edge errors because of the Gibbs effect, whilst detuning errors for the local phase shift occur when SCPS is applied. A novel demodulation method based on pixel-level Lissajous figure and ellipse fitting (PLEF) is presented in this paper. Local demodulation in the spatial domain makes PLEF more flexible than the FT method, without spectral leakage. Based on a more adaptable approach, account is taken of variations in illumination and phase distribution over a few neighboring pixels. The mathematic demodulation model is of interest and has been demonstrated via simulation. Theoretical phase extraction error is as low as 10(-4) rad. Experiments further corroborate the effectiveness of the proposed method. In conclusion, various influencing factors, e.g. variations of background/modulation, phase amplitude, carrier frequency, additive noise that may affect the precision of PLEF are discussed in detail.
WOS关键词PRINCIPAL COMPONENT ANALYSIS ; FRINGE-PATTERN-ANALYSIS ; SHIFTING INTERFEROMETRY ; FOURIER-TRANSFORM ; ALGORITHM ; EXTRACTION ; CALIBRATION ; ERROR
语种英语
WOS记录号WOS:000419659600029
源URL[http://ir.ioe.ac.cn/handle/181551/9364]  
专题光电技术研究所_先光中心
推荐引用方式
GB/T 7714
Liu, Fengwei,Wu, Yongqian,Wu, Fan,et al. Precise phase demodulation of single carrier-frequency interferogram by pixel-level Lissajous figure and ellipse fitting[J]. SCIENTIFIC REPORTS,2018,8:148.
APA Liu, Fengwei.,Wu, Yongqian.,Wu, Fan.,Koenig, Niels.,Schmitt, Robert.,...&Xu, Yan.(2018).Precise phase demodulation of single carrier-frequency interferogram by pixel-level Lissajous figure and ellipse fitting.SCIENTIFIC REPORTS,8,148.
MLA Liu, Fengwei,et al."Precise phase demodulation of single carrier-frequency interferogram by pixel-level Lissajous figure and ellipse fitting".SCIENTIFIC REPORTS 8(2018):148.

入库方式: OAI收割

来源:光电技术研究所

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