Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique
文献类型：期刊论文
| 作者 | Graves, Logan R.1; Choi, Heejoo1; Zhao, Wenchuan2; Oh, Chang Jin1; Su, Peng3; Su, Tianquan4; Kim, Dae Wook1,5 |
| 刊名 | OPTICS LETTERS
 |
| 出版日期 | 2018-05-01 |
| 卷号 | 43期号:9页码:2110-2113 |
| 关键词 | Data handling Interferometry Surface reconstruction |
| ISSN号 | 0146-9592 |
| DOI | 10.1364/OL.43.002110 |
| 文献子类 | J |
| 英文摘要 | We present a novel model-free iterative data-processing approach that improves surface reconstruction accuracy for deflectometry tests of unknown surfaces. This new processing method iteratively reconstructs the surface, leading to reduced error in the final reconstructed surface. The method was implemented in a deflectometry system, and a freeform surface was tested and compared to interferometric test results. The reconstructed departure from interferometric results was reduced from 15.80 mu m RMS with model-based deflectometry down to 5.20 mu m RMS with the iterative technique reported here. (C) 2018 Optical Society of America |
| 语种 | 英语 |
| WOS记录号 | WOS:000431179400043 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/9392]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.College of Optical Sciences, University of Arizona, 1630 E. University Blvd., Tucson; AZ; 85721, United States; 2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 3.ASML Corporation, 77 Danbury Road, Wilton; CT; 06897, United States; 4.KLA-Tencor Corporation, 3 Technology Dr., Miltipas; CA; 95035, United States; 5.Steward Observatory, University of Arizona, 933 N. Cherry Ave., Tucson; AZ; 85719, United States |
| 推荐引用方式 GB/T 7714 | Graves, Logan R.,Choi, Heejoo,Zhao, Wenchuan,et al. Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique[J]. OPTICS LETTERS,2018,43(9):2110-2113. |
| APA | Graves, Logan R..,Choi, Heejoo.,Zhao, Wenchuan.,Oh, Chang Jin.,Su, Peng.,...&Kim, Dae Wook.(2018).Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique.OPTICS LETTERS,43(9),2110-2113. |
| MLA | Graves, Logan R.,et al."Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique".OPTICS LETTERS 43.9(2018):2110-2113. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。