Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses
文献类型:期刊论文
作者 | Liu, Dun1,2; Wu, Shibin1; Yang, Wei1; Wang, Lihua1; Fan, Bin1; Wu, Fan1 |
刊名 | CHINESE OPTICS LETTERS |
出版日期 | 2018-09-10 |
卷号 | 16期号:9页码:90501 |
ISSN号 | 1671-7694 |
关键词 | Alignment Diffraction efficiency Efficiency Errors |
DOI | 10.3788/COL201816.090501 |
文献子类 | J |
英文摘要 | The full aperture complex amplitude transmittance function of a multi-level diffraction lens with mask-alignment errors was derived based on scalar diffraction theory. The point spread function (PSF) was calculated by the Kirchhoff diffraction integral. It is found that the radius of the Airy disk increases with the increase of the error in the direction of misalignment, and the image center shifts along the direction of misalignment. A four-level diffractive lens with a diameter of 80 mm was fabricated, and its PSF and diffraction efficiency of +1st order were calculated and measured. The distribution of PSF is consistent with the calculated results, and the tested diffraction efficiency is slightly smaller than the calculated value; the relative error is 5.71%. |
语种 | 英语 |
WOS记录号 | WOS:000444167600002 |
源URL | [http://ir.ioe.ac.cn/handle/181551/9272] |
专题 | 光电技术研究所_质量处(质检中心) |
作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China |
推荐引用方式 GB/T 7714 | Liu, Dun,Wu, Shibin,Yang, Wei,et al. Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses[J]. CHINESE OPTICS LETTERS,2018,16(9):90501. |
APA | Liu, Dun,Wu, Shibin,Yang, Wei,Wang, Lihua,Fan, Bin,&Wu, Fan.(2018).Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses.CHINESE OPTICS LETTERS,16(9),90501. |
MLA | Liu, Dun,et al."Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses".CHINESE OPTICS LETTERS 16.9(2018):90501. |
入库方式: OAI收割
来源:光电技术研究所
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