中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses

文献类型:期刊论文

作者Liu, Dun1,2; Wu, Shibin1; Yang, Wei1; Wang, Lihua1; Fan, Bin1; Wu, Fan1
刊名CHINESE OPTICS LETTERS
出版日期2018-09-10
卷号16期号:9页码:90501
ISSN号1671-7694
关键词Alignment Diffraction efficiency Efficiency Errors
DOI10.3788/COL201816.090501
文献子类J
英文摘要The full aperture complex amplitude transmittance function of a multi-level diffraction lens with mask-alignment errors was derived based on scalar diffraction theory. The point spread function (PSF) was calculated by the Kirchhoff diffraction integral. It is found that the radius of the Airy disk increases with the increase of the error in the direction of misalignment, and the image center shifts along the direction of misalignment. A four-level diffractive lens with a diameter of 80 mm was fabricated, and its PSF and diffraction efficiency of +1st order were calculated and measured. The distribution of PSF is consistent with the calculated results, and the tested diffraction efficiency is slightly smaller than the calculated value; the relative error is 5.71%.
语种英语
WOS记录号WOS:000444167600002
源URL[http://ir.ioe.ac.cn/handle/181551/9272]  
专题光电技术研究所_质量处(质检中心)
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China;
2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式
GB/T 7714
Liu, Dun,Wu, Shibin,Yang, Wei,et al. Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses[J]. CHINESE OPTICS LETTERS,2018,16(9):90501.
APA Liu, Dun,Wu, Shibin,Yang, Wei,Wang, Lihua,Fan, Bin,&Wu, Fan.(2018).Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses.CHINESE OPTICS LETTERS,16(9),90501.
MLA Liu, Dun,et al."Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses".CHINESE OPTICS LETTERS 16.9(2018):90501.

入库方式: OAI收割

来源:光电技术研究所

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