Structure design of AlN double-ended tuning fork resonators
文献类型：期刊论文
| 作者 | LEI Qiang , 高扬; GAO Yang; Han Chao |
| 刊名 | Proceedings of SPIE - The International Society for Optical Engineering
 |
| 出版日期 | 2017 |
| 卷号 | 10605页码:1060518 |
| 关键词 | micro-sensors AlN DETF sensitivity signal power |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2287156 |
| 其他题名 | Proceedings of SPIE - The International Society for Optical Engineering |
| 文献子类 | Proceedings Paper |
| 英文摘要 | The resonant sensors based on aluminum nitride double-ended tuning fork (AlN DETF) have the characteristics of small size, good stability and reliability, fast response. In order to improve the sensitivity and resolution, it is necessary to analyze the influence of the structure parameters of vibrating beam on the sensitivity and signal power of AlN resonator. The multi-physics model of AlN DETF resonator was established to verify effect of single parameter on the sensitivity by pre-stressed eigenfrequency analysis. The relationships between signal power and length, width of vibrating beam were obtained by post-processing data of simulation results when the thickness remained constant. The results show that relative sensitivity and signal power are growing with opposite direction with the width or the length of the beam. Therefore, there is a design tradeoff between signal power and relative sensitivity of AlN resonator according to the process and structure strength. The optimized AlN DETF resonator was simulated, its sensitivity, signal power and Q are 56 Hz/mu N, 6.8e-4 nW and 958, respectively. |
| 会议地点 | Changchun, PEOPLES R CHINA |
| 电子版国际标准刊号 | 1996-756X |
| WOS关键词 | ALUMINUM NITRIDE |
| 会议日期 | JUL 23-25, 2017 |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000426279000040 |
| ISBN号 | 978-1-5106-1707-0; 978-1-5106-1706-3 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/284203]  |
| 专题 | 高能物理研究所_实验物理中心 |
| 作者单位 | 1.Chinese Acad Sci, Inst High Energy Phys, State Key Lab Particle Detect & Elect, Beijing 100049, Peoples R China 2.China Acad Engn Phys, Inst Elect Engn, Mianyang 621999, Peoples R China 3.Southwest Univ Sci & Technol, Sch Informat Engn, Mianyang 621010, Peoples R China |
| 推荐引用方式 GB/T 7714 | LEI Qiang , 高扬,GAO Yang,Han Chao. Structure design of AlN double-ended tuning fork resonators[J]. Proceedings of SPIE - The International Society for Optical Engineering,2017,10605:1060518. |
| APA | LEI Qiang , 高扬,GAO Yang,&Han Chao.(2017).Structure design of AlN double-ended tuning fork resonators.Proceedings of SPIE - The International Society for Optical Engineering,10605,1060518. |
| MLA | LEI Qiang , 高扬,et al."Structure design of AlN double-ended tuning fork resonators".Proceedings of SPIE - The International Society for Optical Engineering 10605(2017):1060518. |
入库方式： OAI收割
来源：高能物理研究所
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