Structure design of a high-performance aluminum nitride differential resonant accelerometer
文献类型：期刊论文
| 作者 | Lei, Qiang; Gao Y(高扬); Gao, Yang; Zhang, Da-Peng |
| 刊名 | Proceedings of SPIE - The International Society for Optical Engineering
 |
| 出版日期 | 2017 |
| 卷号 | 10605页码:1060519 |
| 关键词 | resonant accelerometer aluminium nitride microleverage supporting beam differential frequency detection |
| ISSN号 | 0277-786X |
| DOI | 10.1117/12.2287159 |
| 其他题名 | Proceedings of SPIE - The International Society for Optical Engineering |
| 文献子类 | Proceedings Paper |
| 英文摘要 | A high-performance aluminum nitride (AlN) differential resonant accelerometer is proposed. The inertia force of the proof mass is amplified to improve the sensitivity by two-stage microlever; the cross sensitivity is reduced by I-shape supporting beam; and the differential frequency detection scheme is used to decrease the effect of temperature common mode error. The accelerometer is mainly composed of proof mass, supporting beam, two-stage microlever and resonator, and its structural parameters are optimized by theoretical analysis and finite element simulation. The modal analysis shows that the fundamental frequencies of the two resonators are approximately 373.3 kHz, and the frequency differences from the interferential modes are about 9.4 kHz, which effectively achieves mode isolation. According to the simulation results of sensitivity, the sensitivity, linearity and cross sensitivity of AlN differential resonator accelerometer are 64.6 Hz/g, 0.787% and 0.0033 Hz/g, respectively. The simulation results of thermal stress show that the temperature sensitivity of a single resonator is about 490 Hz/degrees C, and the temperature sensitivity of output differential frequency is 0.83 Hz/degrees C, which demonstrate that the differential frequency detection scheme can reduce the influence of temperature common mode error. All the above simulation results prove that this structural design of the accelerometer is feasible. |
| 会议地点 | Changchun, PEOPLES R CHINA |
| 电子版国际标准刊号 | 1996-756X |
| WOS关键词 | MICRO-ACCELEROMETER |
| 会议日期 | JUL 23-25, 2017 |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000426279000041 |
| ISBN号 | 978-1-5106-1707-0; 978-1-5106-1706-3 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/285419]  |
| 专题 | 高能物理研究所_实验物理中心 |
| 作者单位 | 1.Chinese Acad Sci, Inst High Energy Phys, State Key Lab Particle Detect & Elect, Beijing 100049, Peoples R China 2.China Acad Engn Phys, Inst Elect Engn, Mianyang 621999, Peoples R China 3.Southwest Univ Sci & Technol, Sch Informat Engn, Mianyang 621010, Peoples R China |
| 推荐引用方式 GB/T 7714 | Lei, Qiang,Gao Y,Gao, Yang,et al. Structure design of a high-performance aluminum nitride differential resonant accelerometer[J]. Proceedings of SPIE - The International Society for Optical Engineering,2017,10605:1060519. |
| APA | Lei, Qiang,高扬,Gao, Yang,&Zhang, Da-Peng.(2017).Structure design of a high-performance aluminum nitride differential resonant accelerometer.Proceedings of SPIE - The International Society for Optical Engineering,10605,1060519. |
| MLA | Lei, Qiang,et al."Structure design of a high-performance aluminum nitride differential resonant accelerometer".Proceedings of SPIE - The International Society for Optical Engineering 10605(2017):1060519. |
入库方式： OAI收割
来源：高能物理研究所
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