Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement
文献类型：期刊论文
| 作者 | Li, Wenhao2; Bayanheshig2; Yu, Hongzhu2; Song, Ying2; Li, Shuo2; Li, Xiaotian2; Wang, Wei2; Liu, Zhaowu2; Lv, Qiang1,2 |
| 刊名 | APPLIED OPTICS
 |
| 出版日期 | 2018-11-01 |
| 卷号 | 57期号:31页码:9455-9463 |
| ISSN号 | 1559-128X |
| DOI | 10.1364/AO.57.009455 |
| 通讯作者 | Li, Wenhao(liwh@ciomp.ac.cn) |
| 英文摘要 | We propose a simple and compact reading head with the Littrow configuration that will increase measurement range and reduce the complexity of a two-dimensional grating-based interferometer. The reading head contains only a beam splitter, two polarizing beam splitter modules, and two mirrors. The theoretical resolutions in two directions are 0.27 nm and 0.18 nm, respectively. In comparison with a dual-frequency laser interferometer, the proposed interferometer can measure displacement from 3 nm to 10 mm with high accuracy. The 3 sigma values in two directions for the difference are 1.67 nm and 1.35 nm for a displacement of 9 nm. Repeatability for a displacement of 1 mu m is better than 2 nm. (C) 2018 Optical Society of America |
| WOS关键词 | LASER ; NONLINEARITY ; ENCODER ; ERRORS ; STAGE |
| 资助项目 | National Natural Science Foundation of China (NSFC)[61227901] ; National Natural Science Foundation of China (NSFC)[61741517] ; Jilin Province Science & Technology Development Program Project in China[20180201035GX] ; Jilin Province Special Funds for High-tech Industrialization ; Chinese Academy of Sciences (CAS)[2018SYHZ0014] |
| WOS研究方向 | Optics |
| 语种 | 英语 |
| WOS记录号 | WOS:000448953800036 |
| 出版者 | OPTICAL SOC AMER |
| 资助机构 | National Natural Science Foundation of China (NSFC) ; Jilin Province Science & Technology Development Program Project in China ; Jilin Province Special Funds for High-tech Industrialization ; Chinese Academy of Sciences (CAS) |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/60385]  |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 通讯作者 | Li, Wenhao |
| 作者单位 | 1.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 2.Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Jilin, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Wenhao,Bayanheshig,Yu, Hongzhu,et al. Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement[J]. APPLIED OPTICS,2018,57(31):9455-9463. |
| APA | Li, Wenhao.,Bayanheshig.,Yu, Hongzhu.,Song, Ying.,Li, Shuo.,...&Lv, Qiang.(2018).Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement.APPLIED OPTICS,57(31),9455-9463. |
| MLA | Li, Wenhao,et al."Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement".APPLIED OPTICS 57.31(2018):9455-9463. |
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