中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Investigation on the influence of high deposition pressure on the mcirostructure and hydrogen impurity incorporated in nanocrystalline diamond films

文献类型:期刊论文

作者Weng, J.1; Liu, F.1; Xiong, L. W.1; Bai, A.1; Wang, J. H.1,2
刊名JOURNAL OF CRYSTAL GROWTH
出版日期2018-08-01
卷号495期号:页码:1-8
关键词High deposition pressure Nanocrystalline diamond Hydrogen impurity Microwave plasma Chemical vapor deposition
ISSN号0022-0248
DOI10.1016/j.jcrysgro.2018.05.011
英文摘要

The impact of high deposition pressure on the microstructure and incorporation hydrogen impurity within nanocrystalline diamond (NCD) films have been investigated in a home-made microwave plasma chemical vapor deposition (MPCVD) apparatus when the microwave power and the substrate temperature were kept constant at 800W and 650 degrees C, respectively. It is found that high deposition pressure not only influences the grain size and quality, but has conception link with the form and content of the bonded-H incorporated in NCD films. With the deposition pressure increases from 10 kPa to 30 kPa, the average grain size decreases from 33 nm to 13 nm and a large amount of hydrogen is detected in the obtained NCD films by Fourier transform infrared spectroscopy (FTIR). Particularly, the NCD films deposited at 15 kPa possesses the largest amount of the bonded H impurity. The optical emission spectroscopy (OES) from the plasma indicates that the intensity ratio between H alpha and C-2 decreases with the increase of the deposition pressure, which suggests the decline energy levels for the excited H atoms. Based on these experimental results the role of high deposition pressure on the growth of NCD films is discussed.

WOS关键词CHEMICAL-VAPOR-DEPOSITION ; HIGH MICROWAVE-POWER ; INFRARED-ABSORPTION ; COLOR-CENTERS ; PLASMA ; NITROGEN ; GROWTH ; NANODIAMOND ; EMISSION ; COATINGS
资助项目Natural Science Foundation of China[51402220] ; Science and Technology Research Program of Hubei Education Department[Q20151517] ; Research Fund of Wuhan Institute of Technology[K201506]
WOS研究方向Crystallography ; Materials Science ; Physics
语种英语
WOS记录号WOS:000433254500001
出版者ELSEVIER SCIENCE BV
源URL[http://ir.hfcas.ac.cn:8080/handle/334002/36536]  
专题合肥物质科学研究院_中科院等离子体物理研究所
通讯作者Liu, F.; Xiong, L. W.
作者单位1.Wuhan Inst Technol, Key Lab Plasma Chem & Adv Mat Hubei Prov, Wuhan 430205, Hubei, Peoples R China
2.Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Anhui, Peoples R China
推荐引用方式
GB/T 7714
Weng, J.,Liu, F.,Xiong, L. W.,et al. Investigation on the influence of high deposition pressure on the mcirostructure and hydrogen impurity incorporated in nanocrystalline diamond films[J]. JOURNAL OF CRYSTAL GROWTH,2018,495(无):1-8.
APA Weng, J.,Liu, F.,Xiong, L. W.,Bai, A.,&Wang, J. H..(2018).Investigation on the influence of high deposition pressure on the mcirostructure and hydrogen impurity incorporated in nanocrystalline diamond films.JOURNAL OF CRYSTAL GROWTH,495(无),1-8.
MLA Weng, J.,et al."Investigation on the influence of high deposition pressure on the mcirostructure and hydrogen impurity incorporated in nanocrystalline diamond films".JOURNAL OF CRYSTAL GROWTH 495.无(2018):1-8.

入库方式: OAI收割

来源:合肥物质科学研究院

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