Fabrication of absorption gratings with X-ray lithography for X-ray phase contrast imaging
文献类型：期刊论文
| 作者 | Wang, B; Wang B(王波) ; Wang YT(王雨婷); Yi FT(伊福廷); Zhang TC(张天冲); Liu J(刘静); Zhou Y(周悦); Wang, YT; Yi, FT; Zhang, TC
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| 刊名 | INTERNATIONAL JOURNAL OF MODERN PHYSICS B
 |
| 出版日期 | 2018 |
| 卷号 | 32期号:13页码:1850163 |
| 关键词 | X-ray phase contrast imaging X-ray lithography high-aspect-ratio |
| ISSN号 | 0217-9792 |
| DOI | 10.1142/S0217979218501631 |
| 文献子类 | Article |
| 英文摘要 | Grating-based X-ray phase contrast imaging is promising especially in the medical area. Two or three gratings are involved in grating-based X-ray phase contrast imaging in which the absorption grating of high-aspect-ratio is the most important device and the fabrication process is a great challenge. The material with large atomic number Z is used to fabricate the absorption grating for excellent absorption of X-ray, and Au is usually used. The fabrication process, which involves X-ray lithography, development and gold electroplating, is described in this paper. The absorption gratings with 4 pm period and about 100 mu m height are fabricated and the high-aspect-ratio is 50. |
| 电子版国际标准刊号 | 1793-6578 |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000431992000013 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/285902]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 通讯作者 | Wang B(王波) |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Wang, B,Wang B,Wang YT,et al. Fabrication of absorption gratings with X-ray lithography for X-ray phase contrast imaging[J]. INTERNATIONAL JOURNAL OF MODERN PHYSICS B,2018,32(13):1850163. |
| APA | Wang, B.,王波.,王雨婷.,伊福廷.,张天冲.,...&Zhou, Y.(2018).Fabrication of absorption gratings with X-ray lithography for X-ray phase contrast imaging.INTERNATIONAL JOURNAL OF MODERN PHYSICS B,32(13),1850163. |
| MLA | Wang, B,et al."Fabrication of absorption gratings with X-ray lithography for X-ray phase contrast imaging".INTERNATIONAL JOURNAL OF MODERN PHYSICS B 32.13(2018):1850163. |
入库方式： OAI收割
来源：高能物理研究所
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