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Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment

文献类型：期刊论文

;
作者Liu J(刘静); Li YC(李延春); Zhang JR(张俊然); Yi FT(伊福廷); Liu, J; Cheng, H; Li, YC; Zhang, JR; Yi, FT
刊名MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS ; MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
出版日期2018 ; 2018
卷号24期号:7页码:3193-3199
ISSN号0946-7076 ; 0946-7076
DOI10.1007/s00542-018-3801-x ; 10.1007/s00542-018-3801-x
文献子类Article ; Article
英文摘要Diamond anvil cell techniques are now well established as a powerful and wide useful method to measure the properties of materials in the very high pressure experiment. However, the measurement of material resistance at the high pressure in the experiment is a big challenge because the electrodes are difficult to be made on the diamond anvil with small top area of the 0.3 mm diameter and have good contact with the sample under the extreme high pressure conditions. In this paper, a new method is used to fabricate the microelectrodes on the diamond anvil surface for the high pressure experiment. Firstly, a special Nickel shadow mask with the electrode patterns, which is made by micro-fabrication technology, is installed and fixed onto the diamond anvil surface with the glue by aligning the electrodes of the shadow mask with the center of the diamond anvil under the microscope. Then, the metal film is deposited onto the anvil with nickel shadow mask by magnetron sputtering. Finally, the microelectrodes having the same patterns with the hollowed structures of the shadow mask can be made with the sputtering material to adhere on the diamond anvil surface after the removal of the shadow mask off the anvil. This new method is simpler, easier to be operated, and less pollution produced to the diamond anvil cell than the traditional method.; Diamond anvil cell techniques are now well established as a powerful and wide useful method to measure the properties of materials in the very high pressure experiment. However, the measurement of material resistance at the high pressure in the experiment is a big challenge because the electrodes are difficult to be made on the diamond anvil with small top area of the 0.3 mm diameter and have good contact with the sample under the extreme high pressure conditions. In this paper, a new method is used to fabricate the microelectrodes on the diamond anvil surface for the high pressure experiment. Firstly, a special Nickel shadow mask with the electrode patterns, which is made by micro-fabrication technology, is installed and fixed onto the diamond anvil surface with the glue by aligning the electrodes of the shadow mask with the center of the diamond anvil under the microscope. Then, the metal film is deposited onto the anvil with nickel shadow mask by magnetron sputtering. Finally, the microelectrodes having the same patterns with the hollowed structures of the shadow mask can be made with the sputtering material to adhere on the diamond anvil surface after the removal of the shadow mask off the anvil. This new method is simpler, easier to be operated, and less pollution produced to the diamond anvil cell than the traditional method.
电子版国际标准刊号1432-1858 ; 1432-1858
WOS关键词HYDROSTATIC-PRESSURE ; HYDROSTATIC-PRESSURE ; RAMAN-SCATTERING ; CELL ; DEPENDENCE ; SYSTEM ; GAP ; RAMAN-SCATTERING ; CELL ; DEPENDENCE ; SYSTEM ; GAP
WOS研究方向Engineering ; Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics ; Science & Technology - Other Topics ; Materials Science ; Physics
语种英语 ; 英语
WOS记录号WOS:000435585500032 ; WOS:000435585500032
源URL[http://ir.ihep.ac.cn/handle/311005/286037]  
专题高能物理研究所_多学科研究中心
高能物理研究所_实验物理中心
高能物理研究所_东莞分部
作者单位中国科学院高能物理研究所
推荐引用方式
GB/T 7714		 Liu J,Li YC,Zhang JR,et al. Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment, Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2018, 2018,24, 24(7):3193-3199, 3193-3199.
APA 刘静.,李延春.,张俊然.,伊福廷.,Liu, J.,...&Yi, FT.(2018).Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,24(7),3193-3199.
MLA 刘静,et al."Fabrication of microelectrodes on diamond anvil for the resistance measurement in high pressure experiment".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 24.7(2018):3193-3199.

入库方式： OAI收割

来源：高能物理研究所

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