Electrodeposition of anisotropic NiFe thin films for integrated high-frequency micro-inductor
文献类型：期刊论文
| 作者 | Yang, LL; Gao, LY; Chen, CH; Liu, ZQ |
| 刊名 | 2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT)
 |
| 出版日期 | 2018-01-04 |
| 页码 | 1241-1245 |
| 关键词 | micro-inductor NiFe thin film in-plane anisotropy magnetic electroplating |
| 英文摘要 | NiFe thin films were fabricated on wafer by applying 100mT external magnetic field during electroplating, and the function of in-plane parallel magnetic field in the course of the plating experiment and magnetic properties have been studied in this paper. Magnetic measurements show that in-plane anisotropy field can be abtained by magnet-electroplating, and the magnetic properties are very sensitive to the thickness of film. The Ni70Fe30 film with thickness of both 0.6 mu m and 1.2 mu m exhibit significantly uniaxial surface anisotropy and the complex permeability of the direction of parallel magnetic field can reach about 220 while 2 mu m NiFe thin film does not have a uniaxial magnetic anisotropy. The results also show that the ferromagnetic-resonance frequency(FMR) can run up to 500Mz when the thickness is suitable, which is an essential performance in the design of micro-inductor devices. |
| 学科主题 | Engineering, Electrical & Electronic |
| 语种 | 英语 |
| WOS记录号 | WOS:000450155700273 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/80222]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 作者单位 | 1.[Yang, Lin-Lin 2.Dalian Jiaotong Univ, Sch Mat Sci & Engn, Dalian 116024, Peoples R China 3.[Yang, Lin-Lin 4.Gao, Li-Yin 5.Chinese Acad Sci, Inst Met Res, Shenyang 110016, Liaoning, Peoples R China |
| 推荐引用方式 GB/T 7714 | Yang, LL,Gao, LY,Chen, CH,et al. Electrodeposition of anisotropic NiFe thin films for integrated high-frequency micro-inductor[J]. 2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT),2018:1241-1245. |
| APA | Yang, LL,Gao, LY,Chen, CH,&Liu, ZQ.(2018).Electrodeposition of anisotropic NiFe thin films for integrated high-frequency micro-inductor.2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT),1241-1245. |
| MLA | Yang, LL,et al."Electrodeposition of anisotropic NiFe thin films for integrated high-frequency micro-inductor".2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT) (2018):1241-1245. |
入库方式： OAI收割
来源：金属研究所
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