Deposition and characterization of phase-pure Ti2AlC and Ti3AlC2 coatings by DC magnetron sputtering with cost-effective targets
文献类型：期刊论文
| 作者 | Li, YM; Zhao, GR; Qian, YH; Xu, JJ; Li, MS |
| 刊名 | VACUUM
 |
| 出版日期 | 2018-07-01 |
| 卷号 | 153页码:62-69 |
| 关键词 | Ti2AlC coating Ti3AlC2 coating Magnetron sputtering Cost-effective target Annealing |
| ISSN号 | 0042-207X |
| DOI | 10.1016/j.vacuum.2018.04.001 |
| 英文摘要 | Ti2AlC and Ti3AlC2 coatings were successfully prepared via a two-step method with initial DC magnetron sputtering at ambient temperature and post annealing at 800 degrees C for 1 h. Particularly, cost-effective targets synthesized by hot-pressing Ti/Al/C powders at low temperature (800 degrees C) were used. The phase components and microstructure of the coatings were characterized by XRD, laser Raman spectroscopy, SEM and TEM. It was found that the phase components of the as-deposited and annealed coatings varied with the molar ratio of Ti, Al and C powders in the cost-effective targets. Phase-pure Ti2AlC and Ti3AlC2 could be obtained from the target with the Ti:Al:C molar ratios of 2:1.5:1 and 3:2:2, respectively. These two coatings were consisted of plate-like grains. Due to the high internal stress resulting from crystallization- or phase transformation-induced volume change, both of the Ti2AlC and Ti3AlC2 coatings cracked during the annealing process. (C) 2018 Elsevier Ltd. All rights reserved. |
| 学科主题 | Materials Science, Multidisciplinary ; Physics, Applied |
| 语种 | 英语 |
| WOS记录号 | WOS:000437043400011 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/80121]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 作者单位 | 1.Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Shenyang 110016, Liaoning, Peoples R China 2.Peking Univ, Shenzhen Inst, Shenzhen 518057, Peoples R China 3.Guangdong Inst New Mat, Natl Engn Lab Modern Mat Surface Engn Technol, Key Lab Guangdong Modern Surface Engn Technol, Guangzhou 510651, Guangdong, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, YM,Zhao, GR,Qian, YH,et al. Deposition and characterization of phase-pure Ti2AlC and Ti3AlC2 coatings by DC magnetron sputtering with cost-effective targets[J]. VACUUM,2018,153:62-69. |
| APA | Li, YM,Zhao, GR,Qian, YH,Xu, JJ,&Li, MS.(2018).Deposition and characterization of phase-pure Ti2AlC and Ti3AlC2 coatings by DC magnetron sputtering with cost-effective targets.VACUUM,153,62-69. |
| MLA | Li, YM,et al."Deposition and characterization of phase-pure Ti2AlC and Ti3AlC2 coatings by DC magnetron sputtering with cost-effective targets".VACUUM 153(2018):62-69. |
入库方式： OAI收割
来源：金属研究所
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