Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films
文献类型：期刊论文
| 作者 | Han, Ke-Chang; Lin, Guo-Qiang; Dong, Chuang; Tai, Kai-Ping; Jiang, Xin; Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. |
| 刊名 | CHINESE ACAD SCIENCES, INST METAL RESEARCH
 |
| 出版日期 | 2017-11-01 |
| 卷号 | 30期号:11页码:1100-1108 |
| 关键词 | Zrnx Films Nitrogen Vacancy Hardness Electrical Properties Band Structure |
| ISSN号 | 1006-7191 |
| 英文摘要 | To study the influence of the nitrogen vacancy (V-N) on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different V-N concentrations were synthesized on the Si (111) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a V-N concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different V-N concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in V-N concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of V-N concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress.; To study the influence of the nitrogen vacancy (V-N) on mechanical and electrical properties of zirconium nitride deeply, ZrNx films with different V-N concentrations were synthesized on the Si (111) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, residual stresses, compositions, chemical states, mechanical and electrical properties of the as-deposited films were characterized by field-emission scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectrometry, Nanoindenter and Hall effect measurements. The results showed that ZrNx films exhibited rocksalt single-phase structure within a V-N concentration ranging from 26 to 5%. The preferred orientation, thickness, grain size and residual stress of the ZrNx films kept constant at different V-N concentrations. Both the nanohardness and elastic modulus first increased and then decreased with the decrease in V-N concentration, reaching the peaks around 16%. And the electric conductivity of the ZrNx films showed a similar tendency with nanohardness. The underlying atomic-scale mechanisms of V-N concentration-dependent hardness and electric conductivity enhancements were discussed and attributed to the different electronic band structures, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress. |
| 学科主题 | Metallurgy & Metallurgical Engineering |
| 语种 | 英语 |
| 资助机构 | National Natural Science Foundation of China [51271047] |
| 公开日期 | 2018-01-10 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/79014]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 通讯作者 | Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Han, Ke-Chang,Lin, Guo-Qiang,Dong, Chuang,et al. Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films[J]. CHINESE ACAD SCIENCES, INST METAL RESEARCH,2017,30(11):1100-1108. |
| APA | Han, Ke-Chang,Lin, Guo-Qiang,Dong, Chuang,Tai, Kai-Ping,Jiang, Xin,&Lin, GQ .(2017).Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films.CHINESE ACAD SCIENCES, INST METAL RESEARCH,30(11),1100-1108. |
| MLA | Han, Ke-Chang,et al."Influence of Nitrogen Vacancy Concentration on Mechanical and Electrical Properties of Rocksalt Zirconium Nitride Films".CHINESE ACAD SCIENCES, INST METAL RESEARCH 30.11(2017):1100-1108. |
入库方式： OAI收割
来源：金属研究所
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