Materials selection in mechanical design for microsensors and microactuators
文献类型：期刊论文
| 作者 | Qian J(钱劲) ; Zhao YP(赵亚溥)
|
| 刊名 | Materials & Design
 |
| 出版日期 | 2002 |
| 卷号 | 23期号:7页码:619-632 |
| 关键词 | Microelectromechanical Systems Materials Selection Mechanical Design Performance Index Microsensors Microactuators Functionally Graded Materials Composites |
| ISSN号 | 0261-3069 |
| 中文摘要 | Microsensors and microactuators are vital organs of microelectromechanical systems (MEMS), forming the interfaces between controller and environment. They are usually used for devices ranging in size at sub-millimeter or micrometer level, transforming energy between two or more domains. Presently, most of the materials used in MEMS devices belong to the silicon material system, which is the basis of the integrated circuit industry. However, new techniques are being explored and developed, and the opportunities for MEMS materials selection are getting broader. The present paper tries to apply 'performance index' to select the material best suited to a given application, in the early stage of MEMS design. The selection is based on matching performance characteristics to the requirements. A series of performance indices are given to allow a wide range comparison of materials for several typical sensing and actuating structures, and a rapid identification of candidates for a given task. (C) 2002 Elsevier Science Ltd. All rights reserved. |
| 类目[WOS] | Materials Science, Multidisciplinary |
| 研究领域[WOS] | Materials Science |
| 关键词[WOS] | FUNCTIONALLY GRADED MATERIALS ; COMPOSITES |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000179796000004 |
| 公开日期 | 2009-08-03 ; 2010-06-13 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/33665]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Qian J,Zhao YP. Materials selection in mechanical design for microsensors and microactuators[J]. Materials & Design,2002,23(7):619-632. |
| APA | 钱劲,&赵亚溥.(2002).Materials selection in mechanical design for microsensors and microactuators.Materials & Design,23(7),619-632. |
| MLA | 钱劲,et al."Materials selection in mechanical design for microsensors and microactuators".Materials & Design 23.7(2002):619-632. |
入库方式： OAI收割
来源：力学研究所
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