A moving-coil designed micro-mechanics tester with application on MEMS
文献类型：期刊论文
| 作者 | Huan Y(郇勇) ; Zhang TH(张泰华); Yang YM(杨业敏)
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| 刊名 | Measurement Science & Technology
 |
| 出版日期 | 2007 |
| 卷号 | 18期号:11页码:3612-3616 |
| 通讯作者邮箱 | zhangth@lnm.imech.ac.cn |
| 关键词 | Micro-Mechanics Tester Design Mems Thin-Films Mechanical-Properties Nanoindentation Technique |
| ISSN号 | 0957-0233 |
| 通讯作者 | Zhang, TH (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100080, Peoples R China. |
| 中文摘要 | A moving-coil designed micro-mechanics tester, named as MicroUTM (universal testing machine), is in-house developed in this paper for micro-mechanics tests. The main component is a moving coil suspended in a uniform magnetic field through a set of springs. When a current passes through the coil, the electromagnetic force is proportional to the magnitude of the current, so the load can easily be measured by the current. The displacement is measured using a capacitive sensor. The load is calibrated using a Sartorius BP211D analytical balance, with a resolution/range of 0.01 mg/80 g or 0.1 mg/210 g. The displacement is calibrated using a HEIDENHAIN CT-6002 length gauge with an accuracy of +/- 0.1 mu m. The calibration results show that the load range is +/- 1 N and the displacement range is +/- 300 mu m. The noise levels of the load and displacement are 50 mu N and 150 nm, respectively. The nonlinearity of the load is only 0.2%. Several in-plane load tests of the MEMS micro-cantilever are performed using this tester. Experimental results, with excellent repeatability, demonstrate the reliability of the load measurement as well as the flexible function of this tester. |
| 类目[WOS] | Engineering, Multidisciplinary ; Instruments & Instrumentation |
| 研究领域[WOS] | Engineering ; Instruments & Instrumentation |
| 关键词[WOS] | THIN-FILMS ; MECHANICAL-PROPERTIES ; NANOINDENTATION TECHNIQUE |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000250199500047 |
| 公开日期 | 2009-08-03 ; 2010-06-13 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/33895]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Huan Y,Zhang TH,Yang YM. A moving-coil designed micro-mechanics tester with application on MEMS[J]. Measurement Science & Technology,2007,18(11):3612-3616. |
| APA | Huan Y,Zhang TH,&Yang YM.(2007).A moving-coil designed micro-mechanics tester with application on MEMS.Measurement Science & Technology,18(11),3612-3616. |
| MLA | Huan Y,et al."A moving-coil designed micro-mechanics tester with application on MEMS".Measurement Science & Technology 18.11(2007):3612-3616. |
入库方式： OAI收割
来源：力学研究所
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