A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing
文献类型：期刊论文
| 作者 | Xiaochen Liu; Lihao Wang; Yinfang Zhu; Junyuan Zhao; Jinying Zhang; Jinling Yang; Fuhua Yang |
| 刊名 | Journal of Micromechanics & Microengineering
 |
| 出版日期 | 2018 |
| 卷号 | 28期号:11页码:115003 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/29018]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang. A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing[J]. Journal of Micromechanics & Microengineering,2018,28(11):115003. |
| APA | Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang.(2018).A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing.Journal of Micromechanics & Microengineering,28(11),115003. |
| MLA | Xiaochen Liu;Lihao Wang;Yinfang Zhu;Junyuan Zhao;Jinying Zhang;Jinling Yang;Fuhua Yang."A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing".Journal of Micromechanics & Microengineering 28.11(2018):115003. |
入库方式： OAI收割
来源：半导体研究所
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