Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire
文献类型：期刊论文
| 作者 | Shuai Yang; Yujie Ai; Yun Zhang; Zhe Cheng; Lian Zhang; Lifang Jia; Boyu Dong; Baohui Zhang; Junxi Wang |
| 刊名 | Journal of Micromechanics & Microengineering
 |
| 出版日期 | 2018 |
| 卷号 | 28期号:8页码:085005 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/29267]  |
| 专题 | 半导体研究所_固态光电信息技术实验室 |
| 推荐引用方式 GB/T 7714 | Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang. Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire[J]. Journal of Micromechanics & Microengineering,2018,28(8):085005. |
| APA | Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang.(2018).Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire.Journal of Micromechanics & Microengineering,28(8),085005. |
| MLA | Shuai Yang;Yujie Ai;Yun Zhang;Zhe Cheng;Lian Zhang;Lifang Jia;Boyu Dong;Baohui Zhang;Junxi Wang."Impact of device parameters on performance of one-port type SAW resonators on AlN/sapphire".Journal of Micromechanics & Microengineering 28.8(2018):085005. |
入库方式： OAI收割
来源：半导体研究所
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