Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading
文献类型：期刊论文
| 作者 | Zhang Y(张吟) ; Wang YS; Li ZH; Huang YB; Li DC
|
| 刊名 | Journal of Microelectromechanical Systems
 |
| 出版日期 | 2007 |
| 卷号 | 16期号:3页码:684-693 |
| 通讯作者邮箱 | zhangyin@lnm.imech.ac.cn ; wangys@ime.pku.edu.cn ; zhhli@ime.pku.edu.cn ; bobohyb@yahoo.com.cn ; dchli@tju.edu.cn |
| 关键词 | Actuators Beams Electrostatic Analysis Modeling Micromachined Beams Shallow Arches Bistable Mems Microactuator Parameters Actuators Stability Model |
| ISSN号 | 1057-7157 |
| 通讯作者 | Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech, Beijing 100080, Peoples R China. |
| 中文摘要 | The snap-through and pull-in instabilities of the micromachined arch-shaped beams under an electrostatic loading are studied both theoretically and experimentally. The pull-in instability that results in a system collision with an electrode substrate may lead to a system failure and, thus, limits the system maximum displacement. The beam/plate structure with a flat initial configuration under an electrostatic loading can only experience the pull-in instability. With the different arch configurations, the structure may experience either only the pull-in instability or the snap-through and pull-in instabilities together. As shown in our computation and experiment, those arch-shaped beams with the snap-through instability have the larger maximum displacement compared with the arch-shaped beams with only the pull-in stability and those with the flat initial configuration. The snap-through occurs by exerting a fixed load, and the structure experiences a discontinuous displacement jump without consuming power. Furthermore, after the snap-through jump, the structures are demonstrated to have the capacity to withstand further electrostatic loading without pull-in. Those properties of consuming no power and increasing the structure deflection range without pull-in is very useful in microelectromechanical systems design, which can offer better sensitivity and tuning range. |
| 类目[WOS] | Engineering, Electrical & Electronic ; Engineering, Mechanical |
| 研究领域[WOS] | Engineering |
| 关键词[WOS] | MICROMACHINED BEAMS ; SHALLOW ARCHES ; BISTABLE MEMS ; MICROACTUATOR ; PARAMETERS ; ACTUATORS ; STABILITY ; MODEL |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000247219200022 |
| 公开日期 | 2009-08-03 ; 2010-06-13 |
| 源URL | [http://dspace.imech.ac.cn/handle/311007/33967]  |
| 专题 | 力学研究所_力学所知识产出(1956-2008) |
| 推荐引用方式 GB/T 7714 | Zhang Y,Wang YS,Li ZH,et al. Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading[J]. Journal of Microelectromechanical Systems,2007,16(3):684-693. |
| APA | 张吟,Wang YS,Li ZH,Huang YB,&Li DC.(2007).Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading.Journal of Microelectromechanical Systems,16(3),684-693. |
| MLA | 张吟,et al."Snap-through and pull-in instabilities of an arch-shaped beam under an electrostatic loading".Journal of Microelectromechanical Systems 16.3(2007):684-693. |
入库方式： OAI收割
来源：力学研究所
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