Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation
文献类型：期刊论文
| 作者 | Li, ZJ; Pan, ZY; Wang, YX; Wei, Q; Zang, LK; Ye, XS; Bai, I; Wang, C; Liu, JR |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 2005-03-01 |
| 卷号 | 192页码:64-69 |
| 关键词 | diamond-like carbon film ion-beam-assisted deposition molecular dynamics simulation |
| ISSN号 | 0257-8972 |
| DOI | 10.1016/j.surfcoat.2004.03.008 |
| 英文摘要 | In this paper, the growth of diamond-like carbon (DLC) films via ion-beam-assisted deposition (IBAD) is simulated using molecular dynamical simulation. The C2 molecules and Ar ions are selected as deposition and assistance projectiles, respectively. The impact energy of Arranges from 10, 30, 50 to 100 eV. We focus our examination on the effects of the assistance/deposition atomic ratio and the incident energy of Ar ions on the growth dynamics and film structure. Simulation results show that the mobility of surface atoms in the cascade region is enhanced by impacting energetic Ar ions, especially at elevated flux and moderate energy, which favor the growth of denser and smoother films with better adhesion to the substrate. Our results agree well with the experimental observation. (C) 2004 Elsevier B.V. All rights reserved. |
| WOS关键词 | DIAMOND-LIKE CARBON ; VAPOR-DEPOSITION ; GROWTH |
| WOS研究方向 | Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000226262300009 |
| 出版者 | ELSEVIER SCIENCE SA |
| 源URL | [http://119.78.100.186/handle/113462/25275]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Pan, ZY |
| 作者单位 | 1.Fudan Univ, Inst Modern Phys, Shanghai 200433, Peoples R China 2.Inner Mongolia Univ Nationalities, Dept Phys, Tongliao 028043, Peoples R China 3.State Key Lab Adv Photon Mat & Devices, Shanghai 200433, Peoples R China 4.NW Inst Nucl Technol, Xian 710024, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, ZJ,Pan, ZY,Wang, YX,et al. Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation[J]. SURFACE & COATINGS TECHNOLOGY,2005,192:64-69. |
| APA | Li, ZJ.,Pan, ZY.,Wang, YX.,Wei, Q.,Zang, LK.,...&Liu, JR.(2005).Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation.SURFACE & COATINGS TECHNOLOGY,192,64-69. |
| MLA | Li, ZJ,et al."Investigation of ion-beam-assisted deposition of DLC films by molecular dynamics simulation".SURFACE & COATINGS TECHNOLOGY 192(2005):64-69. |
入库方式： OAI收割
来源：近代物理研究所
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