Optical and mass spectroscopy measurements of Ar/CH4/H-2 microwave plasma for nano-crystalline diamond film deposition
文献类型：期刊论文
| 作者 | Zhou, Haiyang; Watanabe, Jun; Miyake, Masato; Ogino, Akihisa; Nagatsu, Masaaki; Zhan, Rujuan |
| 刊名 | DIAMOND AND RELATED MATERIALS
 |
| 出版日期 | 2007-04-01 |
| 卷号 | 16页码:675-678 |
| 关键词 | nano-crystalline diamond film plasma CVD optical emission QMS |
| ISSN号 | 0925-9635 |
| DOI | 10.1016/j.diamond.2006.11.074 |
| 英文摘要 | Nano-crystalline diamond (NCD) thin film with grains of about 5-100 nm in size attracts much attention as new functional materials in various industrial fields, due to its unique properties that are different from the conventional microcrystalline diamond (MCD) thin film. Most commonly, NCD film can be synthesized using CH4/Ar plasma with/without a small amount of hydrogen gas added. In this study, we carried out the measurements of quadrupole mass spectroscopy (QMS) and optical emission spectroscopy (OES) to investigate CH4/H-2/Ar mixture plasma in detail. Combined with our experimental results of NCD film synthesis, the mechanism of CH4 dissociation and the precursors of NCD were further explored. (C) 2006 Elsevier B.V. All rights reserved. |
| WOS关键词 | ULTRANANOCRYSTALLINE DIAMOND ; GAS-MIXTURES ; C-2 ; DENSITY ; GROWTH ; MECHANISM ; EMISSION ; HYDROGEN ; METHANE |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| WOS记录号 | WOS:000246608200004 |
| 出版者 | ELSEVIER SCIENCE SA |
| 源URL | [http://119.78.100.186/handle/113462/27198]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Nagatsu, Masaaki |
| 作者单位 | 1.Shizuoka Univ, Grad Sch Sci & Technol, Hamamatsu, Shizuoka 4328561, Japan 2.Univ Sci & Technol China, Dept Modern Phys, CAS, Key Lab Basic Plasma Phys, Anhua 230026, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, Haiyang,Watanabe, Jun,Miyake, Masato,et al. Optical and mass spectroscopy measurements of Ar/CH4/H-2 microwave plasma for nano-crystalline diamond film deposition[J]. DIAMOND AND RELATED MATERIALS,2007,16:675-678. |
| APA | Zhou, Haiyang,Watanabe, Jun,Miyake, Masato,Ogino, Akihisa,Nagatsu, Masaaki,&Zhan, Rujuan.(2007).Optical and mass spectroscopy measurements of Ar/CH4/H-2 microwave plasma for nano-crystalline diamond film deposition.DIAMOND AND RELATED MATERIALS,16,675-678. |
| MLA | Zhou, Haiyang,et al."Optical and mass spectroscopy measurements of Ar/CH4/H-2 microwave plasma for nano-crystalline diamond film deposition".DIAMOND AND RELATED MATERIALS 16(2007):675-678. |
入库方式： OAI收割
来源：近代物理研究所
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