Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna
文献类型：期刊论文
| 作者 | Xu Xu; Li Lin-Sen; Liu Feng; Zhou Qian-Hong; Liang Rong-Qing |
| 刊名 | CHINESE PHYSICS B
 |
| 出版日期 | 2008-11-01 |
| 卷号 | 17页码:4242-4246 |
| 关键词 | inductively coupled plasma Langmuir probe planar antenna density uniformity |
| ISSN号 | 1674-1056 |
| 英文摘要 | This paper develops a humped spiral antenna of top inductively coupled plasma with variable gap. Comparing with planar spiral antennae, it investigates the performance of humped spiral antennae in the calculated electromagnetic configurations and experimental results. It finds that the humped antenna has the improved uniformity of plasma density in the radial direction and the decreased electron temperature in the top inductively coupled plasma. By experimental and theoretical analyses, the plasma performance in the case of humped antennae is considered to be the combined results of the uniform electromagnetic configurations and the depressed capacitively coupling effect. |
| WOS关键词 | INDUCTIVELY-COUPLED PLASMA ; ENERGY DISTRIBUTION FUNCTION ; PARAMETERS ; MICROWAVE |
| 资助项目 | National Natural Science Foundation of China[50577009] |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000261206700047 |
| 出版者 | IOP PUBLISHING LTD |
| 资助机构 | National Natural Science Foundation of China |
| 源URL | [http://119.78.100.186/handle/113462/28482]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Liang Rong-Qing |
| 作者单位 | Fudan Univ, Inst Modern Phys, Appl Ion Beam Phys Lab, Shanghai 200433, Peoples R China |
| 推荐引用方式 GB/T 7714 | Xu Xu,Li Lin-Sen,Liu Feng,et al. Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna[J]. CHINESE PHYSICS B,2008,17:4242-4246. |
| APA | Xu Xu,Li Lin-Sen,Liu Feng,Zhou Qian-Hong,&Liang Rong-Qing.(2008).Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna.CHINESE PHYSICS B,17,4242-4246. |
| MLA | Xu Xu,et al."Improving the uniformity of RF-plasma density by a humped variable-gap spiral antenna".CHINESE PHYSICS B 17(2008):4242-4246. |
入库方式： OAI收割
来源：近代物理研究所
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