Improvement of uniformity of inductively coupled plasma with a cone spiral antenna
文献类型：期刊论文
| 作者 | Li Lin-Sen; Xu Xu; Liu Feng; Zhou Qian-Hong; Nie Zong-Fu; Liang Yi-Zi; Liang Rong-Qing |
| 刊名 | CHINESE PHYSICS LETTERS
 |
| 出版日期 | 2008-06-01 |
| 卷号 | 25页码:2144-2146 |
| ISSN号 | 0256-307X |
| 英文摘要 | Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is experimentally investigated. The results indicate that the uniformity of plasma density in the radial direction is obviously improved as compared to the ICP with a planar spiral antenna. Performance of ICP is analysed with the experimental results. |
| WOS关键词 | MICROWAVE |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000256252600060 |
| 出版者 | IOP PUBLISHING LTD |
| 源URL | [http://119.78.100.186/handle/113462/29132]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Liang Rong-Qing |
| 作者单位 | Fudan Univ, Inst Modern Phys, Shanghai 200433, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li Lin-Sen,Xu Xu,Liu Feng,et al. Improvement of uniformity of inductively coupled plasma with a cone spiral antenna[J]. CHINESE PHYSICS LETTERS,2008,25:2144-2146. |
| APA | Li Lin-Sen.,Xu Xu.,Liu Feng.,Zhou Qian-Hong.,Nie Zong-Fu.,...&Liang Rong-Qing.(2008).Improvement of uniformity of inductively coupled plasma with a cone spiral antenna.CHINESE PHYSICS LETTERS,25,2144-2146. |
| MLA | Li Lin-Sen,et al."Improvement of uniformity of inductively coupled plasma with a cone spiral antenna".CHINESE PHYSICS LETTERS 25(2008):2144-2146. |
入库方式： OAI收割
来源：近代物理研究所
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