Preparation and Spectroscopy Investigation of Vanadium Oxide Films Deposited by DC Magnetron Sputtering
文献类型：期刊论文
| 作者 | Li Li-sha2; Cui Hai-ning1; Jiang Zhen-yi3 |
| 刊名 | SPECTROSCOPY AND SPECTRAL ANALYSIS
 |
| 出版日期 | 2011 |
| 卷号 | 31页码:95-99 |
| 关键词 | Vanadium oxide films DC magnetron sputtering Ultraviolet-visible (UV-Vis) spectrum Infrared spectrum (FTIR) Laser Raman spectrum |
| ISSN号 | 1000-0593 |
| DOI | 10.3964/j.issn.1000-0593(2011)01-0095-05 |
| 英文摘要 | Vanadium oxide films were deposited at different substrate temperatures up to 400 degrees C by DC magnetron sputtering, and through the method of the X-ray diffraction, electron scanning microscopy, infrared and Raman spectra, the present paper studies the structure properties of those films, and through the method of spectrum measuring and fitting, this paper studies the optical properties of the films. At low temperature of preparation the optical films have high optical transmittance. The films prepared at low substrate temperature (lower than 200 degrees C) have amorphous structure and some films prepared at high substrate temperatures (higher than 200 degrees C) have polycrystalline structure. The films' optical parameters were achieved by using classic model to fit the characteristic of transmittance. |
| WOS关键词 | THIN-FILMS ; V2O5 FILMS ; ELECTROCHEMICAL PROPERTIES ; SUBSTRATE-TEMPERATURE ; PENTOXIDE |
| WOS研究方向 | Spectroscopy |
| 语种 | 英语 |
| WOS记录号 | WOS:000286290900023 |
| 出版者 | OFFICE SPECTROSCOPY & SPECTRAL ANALYSIS |
| 源URL | [http://119.78.100.186/handle/113462/33694]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Cui Hai-ning |
| 作者单位 | 1.Jilin Univ, Coll Phys, Changchun 130012, Peoples R China 2.NW Univ Xian, Dept Phys, Xian 710069, Peoples R China 3.NW Univ Xian, Inst Modern Phys, Xian 710069, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li Li-sha,Cui Hai-ning,Jiang Zhen-yi. Preparation and Spectroscopy Investigation of Vanadium Oxide Films Deposited by DC Magnetron Sputtering[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS,2011,31:95-99. |
| APA | Li Li-sha,Cui Hai-ning,&Jiang Zhen-yi.(2011).Preparation and Spectroscopy Investigation of Vanadium Oxide Films Deposited by DC Magnetron Sputtering.SPECTROSCOPY AND SPECTRAL ANALYSIS,31,95-99. |
| MLA | Li Li-sha,et al."Preparation and Spectroscopy Investigation of Vanadium Oxide Films Deposited by DC Magnetron Sputtering".SPECTROSCOPY AND SPECTRAL ANALYSIS 31(2011):95-99. |
入库方式： OAI收割
来源：近代物理研究所
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