Study on ion beam-assisted deposition of thin Au films by molecular dynamics simulation
文献类型：期刊论文
| 作者 | Zhang, QY; Tang, JY; Zhao, GQ |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 1998-05-01 |
| 卷号 | 104页码:36-39 |
| 关键词 | Au film ion beam-assisted deposition molecular dynamics simulation |
| ISSN号 | 0257-8972 |
| 英文摘要 | The ion beam-assisted deposition (IBAD) of thin Au films with a very low ion energy was simulated by molecular dynamics methods with the atom interaction potential of embedded atom methods. IBAD results are compared with the film growth without ion assistance and the film growth with energetic atom deposition. The effects of the arrival ratio of ion-to-atom, the energy of ions, and off-normal ion incidence on the film growth are discussed. Simulation results show that a low ion energy and high arrival ratio of ion-to-atom can result in him growth in the layer-by-layer mode. (C) 1998 Elsevier Science S.A. |
| WOS关键词 | ENERGETIC DEPOSITION ; ULTRAHIGH-VACUUM ; FCC METALS ; GROWTH ; BOMBARDMENT ; ATOM ; AG |
| WOS研究方向 | Materials Science ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000074733200008 |
| 出版者 | ELSEVIER SCIENCE SA |
| 源URL | [http://119.78.100.186/handle/113462/35387]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Zhang, QY |
| 作者单位 | 1.Fudan Univ, Inst Modern Phys, Accelerator Based Atom & Nucl Phys Lab, Shanghai 200433, Peoples R China 2.Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, QY,Tang, JY,Zhao, GQ. Study on ion beam-assisted deposition of thin Au films by molecular dynamics simulation[J]. SURFACE & COATINGS TECHNOLOGY,1998,104:36-39. |
| APA | Zhang, QY,Tang, JY,&Zhao, GQ.(1998).Study on ion beam-assisted deposition of thin Au films by molecular dynamics simulation.SURFACE & COATINGS TECHNOLOGY,104,36-39. |
| MLA | Zhang, QY,et al."Study on ion beam-assisted deposition of thin Au films by molecular dynamics simulation".SURFACE & COATINGS TECHNOLOGY 104(1998):36-39. |
入库方式： OAI收割
来源：近代物理研究所
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