Properties of tantalum pentoxide (Ta2O5) obtained by plasma assisted deposition using a TaF5 source
文献类型：期刊论文
| 作者 | Four, S; Devine, RAB; Luo, EZ; Wilson, IH; Cheng, HS |
| 刊名 | JOURNAL OF NON-CRYSTALLINE SOLIDS
 |
| 出版日期 | 1999-09-01 |
| 卷号 | 254页码:139-145 |
| ISSN号 | 0022-3093 |
| 英文摘要 | Tantalum pentoxide thin films were deposited by plasma enhanced chemical vapour deposition, using a TaF5 source, and a microwave excited H-2/O-2 plasma. Physical and electrical measurements were carried out on samples produced using different deposition conditions. Optimal microwave power and H-2 how rate during deposition were determined. The presence of fluorine in the deposited films was detected by Rutherford backscattering spectroscopy. Its concentration was determined. Measurements of the bond polarisability as a function of F concentration indicated that it is in oxygen replacement sites as opposed to interstitial. (C) 1999 Elsevier Science B.V. All rights reserved. |
| WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; FILMS |
| WOS研究方向 | Materials Science |
| 语种 | 英语 |
| 出版者 | ELSEVIER SCIENCE BV |
| WOS记录号 | WOS:000082513900021 |
| 源URL | [http://119.78.100.186/handle/113462/36242]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Devine, RAB |
| 作者单位 | 1.France Telecom, Ctr Natl Etud Telecommun, F-38243 Meylan, France 2.Inst Natl Sci Appl, LPM, UMR 5511, CNRS, F-69621 Villeurbanne, France 3.Chinese Univ Hong Kong, Dept Elect Engn, Hong Kong, Peoples R China 4.Fudan Univ, Inst Modern Phys, Shanghai 200433, Peoples R China |
| 推荐引用方式 GB/T 7714 | Four, S,Devine, RAB,Luo, EZ,et al. Properties of tantalum pentoxide (Ta2O5) obtained by plasma assisted deposition using a TaF5 source[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,1999,254:139-145. |
| APA | Four, S,Devine, RAB,Luo, EZ,Wilson, IH,&Cheng, HS.(1999).Properties of tantalum pentoxide (Ta2O5) obtained by plasma assisted deposition using a TaF5 source.JOURNAL OF NON-CRYSTALLINE SOLIDS,254,139-145. |
| MLA | Four, S,et al."Properties of tantalum pentoxide (Ta2O5) obtained by plasma assisted deposition using a TaF5 source".JOURNAL OF NON-CRYSTALLINE SOLIDS 254(1999):139-145. |
入库方式： OAI收割
来源：近代物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。