Impact-energy dependence of atomic mobility in diamondlike carbon film growth
文献类型：期刊论文
| 作者 | Wei, Q; Pan, ZY; Li, ZJ; Zhang, ZX; Zang, LK; Wang, YX; Ye, XS; Bai, T; Wang, C; Liu, JR |
| 刊名 | PHYSICAL REVIEW B
 |
| 出版日期 | 2003-12-01 |
| 卷号 | 68页码:5 |
| ISSN号 | 1098-0121 |
| DOI | 10.1103/PhysRevB.68.235408 |
| 英文摘要 | In this paper, the deposition of energetic C-2 clusters on silicon and diamond surfaces is investigated by molecular dynamics simulation. The impact energy ranges from 0.5 to 60 eV in order to compare with experiments of diamondlike carbon (DLC) film synthesis by femtosecond (fs) pulsed laser deposition. The influence of the impact energy on the deposition dynamics as well as the structure of the synthesized films is addressed. Simulations show that at the earlier stage of the deposition, the mobility of surface atoms, especially the recoil atoms, is enhanced at elevated incident energies, and contributes to the smooth growth of DLC films. Our results are consistent with experimental observations. |
| WOS关键词 | VAPOR-DEPOSITION ; SURFACE ; CHEMISORPTION ; TEMPERATURE ; DIFFUSION |
| WOS研究方向 | Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000188186400098 |
| 出版者 | AMERICAN PHYSICAL SOC |
| 源URL | [http://119.78.100.186/handle/113462/38456]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Pan, ZY |
| 作者单位 | 1.Fudan Univ, Inst Modern Phys, Shanghai 200433, Peoples R China 2.State Key Lab Adv Photon Mat & Devices, Shanghai 200433, Peoples R China 3.NW Inst Nucl Technol, Xian 710024, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wei, Q,Pan, ZY,Li, ZJ,et al. Impact-energy dependence of atomic mobility in diamondlike carbon film growth[J]. PHYSICAL REVIEW B,2003,68:5. |
| APA | Wei, Q.,Pan, ZY.,Li, ZJ.,Zhang, ZX.,Zang, LK.,...&Liu, JR.(2003).Impact-energy dependence of atomic mobility in diamondlike carbon film growth.PHYSICAL REVIEW B,68,5. |
| MLA | Wei, Q,et al."Impact-energy dependence of atomic mobility in diamondlike carbon film growth".PHYSICAL REVIEW B 68(2003):5. |
入库方式： OAI收割
来源：近代物理研究所
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