Raman spectra and XPS analyses of the diamond-like carbon film deposited by surface wave plasma
文献类型：期刊论文
| 作者 | Huang, WD; Zhan, RJ |
| 刊名 | SPECTROSCOPY AND SPECTRAL ANALYSIS
 |
| 出版日期 | 2003-06-01 |
| 卷号 | 23页码:512-514 |
| 关键词 | diamond-like carbon Raman spectrum XpS sp(3) |
| ISSN号 | 1000-0593 |
| 英文摘要 | Raman spectrum and X-ray photoelectron spectroscopy (XPS) were used for the structural analysis of diamond-like carbon (DLC) film deposited by surface wave plasma. Decomposition methods were used respectively to achieve the quantitative measurement of sp(3) content of the films deposited under different working times. We obtained the result that the sp(3) bonding of the films was in the range of 20%-40% and increased with the depositing time by using both analysis methods. |
| WOS关键词 | CHEMICAL-VAPOR-DEPOSITION ; AMORPHOUS-CARBON ; THIN-FILMS ; SCATTERING |
| WOS研究方向 | Spectroscopy |
| 语种 | 英语 |
| WOS记录号 | WOS:000183917000026 |
| 出版者 | BEIJING UNIV PRESS |
| 源URL | [http://119.78.100.186/handle/113462/38700]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Huang, WD |
| 作者单位 | Univ Sci & Technol China, Chinese Acad Sci, Struct Res Lab, Dept Modern Phys, Hefei 230026, Peoples R China |
| 推荐引用方式 GB/T 7714 | Huang, WD,Zhan, RJ. Raman spectra and XPS analyses of the diamond-like carbon film deposited by surface wave plasma[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS,2003,23:512-514. |
| APA | Huang, WD,&Zhan, RJ.(2003).Raman spectra and XPS analyses of the diamond-like carbon film deposited by surface wave plasma.SPECTROSCOPY AND SPECTRAL ANALYSIS,23,512-514. |
| MLA | Huang, WD,et al."Raman spectra and XPS analyses of the diamond-like carbon film deposited by surface wave plasma".SPECTROSCOPY AND SPECTRAL ANALYSIS 23(2003):512-514. |
入库方式： OAI收割
来源：近代物理研究所
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