The modification of LiTaO3 crystal by low-energy He-ion implantation
文献类型：期刊论文
| 作者 | Pang, L. L.1; Wang, Z. G.1; Jin, Y. F.1; Yao, C. F.1; Cui, M. H.1,2; Sun, J. R.1; Shen, T. L.1,2; Wei, K. F.1; Zhu, Y. B.1,2; Sheng, Y. B.1 |
| 刊名 | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
 |
| 出版日期 | 2012-11-01 |
| 卷号 | 290页码:54-58 |
| 关键词 | Lithium Tantalate He Implantation Transmittance Surface Defect |
| ISSN号 | 0168-583X |
| DOI | 10.1016/j.nimb.2012.09.003 |
| 文献子类 | Article |
| 英文摘要 | The effects of He-ion implantation on the surface morphology and transmittance of LiTaO3 single crystals are investigated. The samples were implanted with 250 key He-ion at different fluences at room temperature. The results show that the surface morphology and transmittance of implanted samples strongly depend on the ion fluence and the time when the samples expose to the air up to 60 days. When the fluence is above 1.0 x 10(16) He+/cm(2), the transmission spectra indicate that a high concentration of defects is created. 3D-profile images show that at the higher fluence a great many triangular stripes appear on the surface of the samples. After 60 days, the recovery of the transmittance occurs and varies with the fluence. For the sample at the fluence of 5.0 x 10(16) He+/cm(2), the raised stripes on the surface evolve into narrow cracks. Regional exfoliation, however, occurs on the surface of the sample with the fluence of 1.0 x 10(17) He+/cm(2). According to the experimental results and simulation of SRIM 2008 code, the evolvement of defects and the behavior of He are discussed. Published by Elsevier B.V. |
| WOS关键词 | INSULATOR MATERIAL TECHNOLOGY ; THIN-FILM TRANSFER ; LITHIUM TANTALATE ; WAVE-GUIDES ; HELIUM ; LINBO3 ; FABRICATION ; MICROSCOPY |
| 资助项目 | National Natural Science Foundation of China[10835010] |
| WOS研究方向 | Instruments & Instrumentation ; Nuclear Science & Technology ; Physics |
| 语种 | 英语 |
| WOS记录号 | WOS:000311466500010 |
| 出版者 | ELSEVIER SCIENCE BV |
| 源URL | [http://119.78.100.186/handle/113462/48981]  |
| 专题 | 中国科学院近代物理研究所 |
| 通讯作者 | Wang, Z. G. |
| 作者单位 | 1.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Pang, L. L.,Wang, Z. G.,Jin, Y. F.,et al. The modification of LiTaO3 crystal by low-energy He-ion implantation[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2012,290:54-58. |
| APA | Pang, L. L..,Wang, Z. G..,Jin, Y. F..,Yao, C. F..,Cui, M. H..,...&Li, Y. F..(2012).The modification of LiTaO3 crystal by low-energy He-ion implantation.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,290,54-58. |
| MLA | Pang, L. L.,et al."The modification of LiTaO3 crystal by low-energy He-ion implantation".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 290(2012):54-58. |
入库方式： OAI收割
来源：近代物理研究所
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